S. Mühlig, J. Siepmann, M. Lotz, A. Wiegmann, G. Blobel, S. Mika, A. Beutler, U. Nehse
{"title":"光学非球面和自由曲面测量的最新进展","authors":"S. Mühlig, J. Siepmann, M. Lotz, A. Wiegmann, G. Blobel, S. Mika, A. Beutler, U. Nehse","doi":"10.1117/12.2191247","DOIUrl":null,"url":null,"abstract":"Two techniques for the measurement of aspheres as well as freeforms are presented. The first method, the tilted wave interferometer, is a full aperture interferometric measurement method without any moving parts during the measurement. The second method applies an optical single point sensor in conjunction with two translational and one rotational axes. Both techniques are compared by measuring a selected asphere and a special freeform surface. Differences between both measurement principles are discussed.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Current developments on optical asphere and freeform metrology\",\"authors\":\"S. Mühlig, J. Siepmann, M. Lotz, A. Wiegmann, G. Blobel, S. Mika, A. Beutler, U. Nehse\",\"doi\":\"10.1117/12.2191247\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Two techniques for the measurement of aspheres as well as freeforms are presented. The first method, the tilted wave interferometer, is a full aperture interferometric measurement method without any moving parts during the measurement. The second method applies an optical single point sensor in conjunction with two translational and one rotational axes. Both techniques are compared by measuring a selected asphere and a special freeform surface. Differences between both measurement principles are discussed.\",\"PeriodicalId\":212434,\"journal\":{\"name\":\"SPIE Optical Systems Design\",\"volume\":\"6 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-09-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE Optical Systems Design\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2191247\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Optical Systems Design","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2191247","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Current developments on optical asphere and freeform metrology
Two techniques for the measurement of aspheres as well as freeforms are presented. The first method, the tilted wave interferometer, is a full aperture interferometric measurement method without any moving parts during the measurement. The second method applies an optical single point sensor in conjunction with two translational and one rotational axes. Both techniques are compared by measuring a selected asphere and a special freeform surface. Differences between both measurement principles are discussed.
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