MEMS传感器模块ESD系统级仿真

2018 40th Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD) Pub Date : 2018-09-01 DOI:10.23919/EOS/ESD.2018.8509773

G. Langguth, F. Nieden, C. Kupfer, O. Rösch, Benno Mühlbacher, E. Bach

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引用次数: 0

摘要

提出了一种微机电系统传感器模块的系统级仿真方法。将模块保护和测试仪寄生建模为理想的RLC网络。片上ESD保护仿真基于紧凑的模型。仿真结果可以定量地解释鉴定失败并验证方法，从而实现对整体ESD保护的后续优化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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ESD System Level Simulation of MEMS Sensor Modules

A system level simulation approach is presented for MEMS sensor modules. Module protection and tester parasitics are modelled as ideal RLC network. On-chip ESD protection simulation is based on compact models. Simulation results can quantitatively explain qualification fails and validate the approach, enabling a subsequent optimization of the overall ESD protection.

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2018 40th Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD)

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