L. G. Pagani, P. Frigerio, Dario Falato, Christian Padovani, F. Rizzini, G. Langfelder
{"title":"调频MEMS加速度计的主动冲击/振动抑制","authors":"L. G. Pagani, P. Frigerio, Dario Falato, Christian Padovani, F. Rizzini, G. Langfelder","doi":"10.1109/INERTIAL53425.2022.9787745","DOIUrl":null,"url":null,"abstract":"The work presents a novel system formed by a frequency-modulated microelectromechanical system (MEMS) accelerometer and an associated circuit which sustains the anti-phase resonant mode of the MEMS and at the same time operates an active damping of the in-phase, acceleration-sensitive, mode. Within (500x500) µm2, at noise levels in the 50 µg/√Hz range, the system recovers from large (>100 g) shocks in less than 3 ms, which is about 20 times less than in absence of active damping compensation. Additionally, it stands vibrations sweeping around the sensing mode frequency without noticeable effects.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Active Shock/Vibes Rejection in FM MEMS Accelerometers\",\"authors\":\"L. G. Pagani, P. Frigerio, Dario Falato, Christian Padovani, F. Rizzini, G. Langfelder\",\"doi\":\"10.1109/INERTIAL53425.2022.9787745\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The work presents a novel system formed by a frequency-modulated microelectromechanical system (MEMS) accelerometer and an associated circuit which sustains the anti-phase resonant mode of the MEMS and at the same time operates an active damping of the in-phase, acceleration-sensitive, mode. Within (500x500) µm2, at noise levels in the 50 µg/√Hz range, the system recovers from large (>100 g) shocks in less than 3 ms, which is about 20 times less than in absence of active damping compensation. Additionally, it stands vibrations sweeping around the sensing mode frequency without noticeable effects.\",\"PeriodicalId\":435781,\"journal\":{\"name\":\"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"61 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL53425.2022.9787745\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL53425.2022.9787745","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Active Shock/Vibes Rejection in FM MEMS Accelerometers
The work presents a novel system formed by a frequency-modulated microelectromechanical system (MEMS) accelerometer and an associated circuit which sustains the anti-phase resonant mode of the MEMS and at the same time operates an active damping of the in-phase, acceleration-sensitive, mode. Within (500x500) µm2, at noise levels in the 50 µg/√Hz range, the system recovers from large (>100 g) shocks in less than 3 ms, which is about 20 times less than in absence of active damping compensation. Additionally, it stands vibrations sweeping around the sensing mode frequency without noticeable effects.
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