声耦合薄膜BAW器件的带宽改进方法

V. Kulkarni, K. Prasad, B. Barber
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引用次数: 4

摘要

本文介绍了一种叠晶滤波器(SCF)的结果。结果表明,SCF的带宽可以通过选择电极材料、器件尺寸和使用电感等外部元件来设计。本文还讨论了SCF的制作和器件布局。设计了单级和两级流场,结果表明,只有在两级之间连接电感器才能增加两级流场的带宽
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Bandwidth Improvement Methods In Acoustically-Coupled Thin Film BAW Devices
In this paper, the results of a stacked crystal filter (SCF) are presented. It is shown that the bandwidth of the SCF can be designed by choice of electrode materials, device dimensions and use of external components such as inductors. This paper also discusses the fabrication of SCF along with the device layouts. A single stage and a two-stage SCF are designed and it is shown that the bandwidth of two-stage can only be increased if the inductor is connected between stages
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