{"title":"基于模糊控制器的演示系统","authors":"N. Godfrey, Hua Li, W. Marcy","doi":"10.1109/IEMT.1993.398166","DOIUrl":null,"url":null,"abstract":"In the semiconductor manufacturing industry, many systems to be controlled are highly nonlinear and dynamic. A demonstration project, real-time control of a beam balancing system based on fuzzy logic, is described. This prototyping system can be operated automatically by the execution of a fuzzy control algorithm. Unlike most of the conventional and optimal control algorithms, this fuzzy logic controller requires no explicit system parameters. It is characterized by its simplicity and robustness.<<ETX>>","PeriodicalId":206206,"journal":{"name":"Proceedings of 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1993-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A demonstration system based on a fuzzy logic controller\",\"authors\":\"N. Godfrey, Hua Li, W. Marcy\",\"doi\":\"10.1109/IEMT.1993.398166\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In the semiconductor manufacturing industry, many systems to be controlled are highly nonlinear and dynamic. A demonstration project, real-time control of a beam balancing system based on fuzzy logic, is described. This prototyping system can be operated automatically by the execution of a fuzzy control algorithm. Unlike most of the conventional and optimal control algorithms, this fuzzy logic controller requires no explicit system parameters. It is characterized by its simplicity and robustness.<<ETX>>\",\"PeriodicalId\":206206,\"journal\":{\"name\":\"Proceedings of 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1993-10-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEMT.1993.398166\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEMT.1993.398166","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A demonstration system based on a fuzzy logic controller
In the semiconductor manufacturing industry, many systems to be controlled are highly nonlinear and dynamic. A demonstration project, real-time control of a beam balancing system based on fuzzy logic, is described. This prototyping system can be operated automatically by the execution of a fuzzy control algorithm. Unlike most of the conventional and optimal control algorithms, this fuzzy logic controller requires no explicit system parameters. It is characterized by its simplicity and robustness.<>
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