0.15μm双栅pm - hemt的实验提取建模

D. Langrez, E. Delos, G. Salmer
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引用次数: 5

摘要

本文介绍了一种新的表征方法对0.15μm双栅pm - hemt的实验结果。它包括一个循序渐进的程序,允许提取双栅器件的整个等效方案。所有寄生元件都是通过在“冷”状态(Vds=0V)下偏置双栅极场效应管(DGFET)来确定的:正向栅极偏置条件允许从Zij参数推断出一系列元件的值,如接入电阻和电感,并且,反向栅极偏置条件导致平行焊盘和耦合电容从Yij参数。对于固有元素,级联码配置被保留:DGFET被认为是两个等效单栅极晶体管的关联。晶圆上的三端口s参数测量在1.5至26.5 GHz范围内进行,使用我们在实验室开发的特定测试台。
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Modelling of 0.15μm Dual Gate PM-HEMTs by using Experimental Extraction
In this paper are presented some new experimental results concerning 0.15μm dual gate PM-HEMTs obtained by using a new method of characterization. It consists of a step-by-step procedure which allows to extract the entire equivalent scheme of dual gate devices. All parasitic elements are determined by biasing the Dual Gate FET (DGFET) under 'cold' regime (Vds=0V) : the forward gates bias conditions allow to deduce the value of serie elements like access resistances and inductances from Zij parameters, and, the reverse gates bias conditions lead to the parallel pad and coupling capacitances from Yij parameters. For intrinsic elements, the cascode configuration has been retained : the DGFET is considered as being the association of two equivalent single gate transistors. On wafer three-ports S-parameters measurements are performed from 1.5 to 26.5 GHz with a specific test bench that we have developped in our laboratory.
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