微机械谐振器的质量因子控制

1992 International Technical Digest on Electron Devices Meeting Pub Date : 1900-01-01 DOI:10.1109/IEDM.1992.307411

C. Nguyen, Roger T. IAowe

{"title":"微机械谐振器的质量因子控制","authors":"C. Nguyen, Roger T. IAowe","doi":"10.1109/IEDM.1992.307411","DOIUrl":null,"url":null,"abstract":"The implementation of very high Q microelectromechanical filters, constructed of spring-coupled or parallel resonators, requires strict control over the quality factor of the constituent resonators. This report details electrostatic feedback techniques which allow precise control of the quality factor of a micromechanical resonator device, independent of the ambient operating pressure of the micromechanical system. Theoretical formulas governing Q-control are derived and experimentally verified.<<ETX>>","PeriodicalId":287098,"journal":{"name":"1992 International Technical Digest on Electron Devices Meeting","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"67","resultStr":"{\"title\":\"Quality factor control for micromechanical resonators\",\"authors\":\"C. Nguyen, Roger T. IAowe\",\"doi\":\"10.1109/IEDM.1992.307411\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The implementation of very high Q microelectromechanical filters, constructed of spring-coupled or parallel resonators, requires strict control over the quality factor of the constituent resonators. This report details electrostatic feedback techniques which allow precise control of the quality factor of a micromechanical resonator device, independent of the ambient operating pressure of the micromechanical system. Theoretical formulas governing Q-control are derived and experimentally verified.<<ETX>>\",\"PeriodicalId\":287098,\"journal\":{\"name\":\"1992 International Technical Digest on Electron Devices Meeting\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"67\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1992 International Technical Digest on Electron Devices Meeting\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.1992.307411\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1992 International Technical Digest on Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.1992.307411","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 67

摘要

实现由弹簧耦合或并联谐振器构成的非常高Q的微机电滤波器，需要严格控制各组成谐振器的质量因子。本报告详细介绍了静电反馈技术，该技术可以精确控制微机械谐振器设备的质量因子，而不受微机械系统的环境操作压力的影响。推导了控制q的理论公式，并进行了实验验证

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Quality factor control for micromechanical resonators

The implementation of very high Q microelectromechanical filters, constructed of spring-coupled or parallel resonators, requires strict control over the quality factor of the constituent resonators. This report details electrostatic feedback techniques which allow precise control of the quality factor of a micromechanical resonator device, independent of the ambient operating pressure of the micromechanical system. Theoretical formulas governing Q-control are derived and experimentally verified.<>

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来源期刊

1992 International Technical Digest on Electron Devices Meeting

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