Shun Liu, P. Zhu, Zhecong Lin, Yabin Zhou, M. Soto
{"title":"基于分布式光纤传感的实时翘曲变形监测","authors":"Shun Liu, P. Zhu, Zhecong Lin, Yabin Zhou, M. Soto","doi":"10.1117/12.2668453","DOIUrl":null,"url":null,"abstract":"The warpage deformation of a silicon plate is monitored in real-time using distributed optical fiber and the influence of data resolution on the measurement result is studied. The experimental results show that this method has good accuracy and the relationship between data resolution and measurement error is non-linear.","PeriodicalId":227067,"journal":{"name":"International Conference on Precision Instruments and Optical Engineering","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-02-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Real-time warpage deformation monitoring using distributed optical fiber sensing\",\"authors\":\"Shun Liu, P. Zhu, Zhecong Lin, Yabin Zhou, M. Soto\",\"doi\":\"10.1117/12.2668453\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The warpage deformation of a silicon plate is monitored in real-time using distributed optical fiber and the influence of data resolution on the measurement result is studied. The experimental results show that this method has good accuracy and the relationship between data resolution and measurement error is non-linear.\",\"PeriodicalId\":227067,\"journal\":{\"name\":\"International Conference on Precision Instruments and Optical Engineering\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-02-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Precision Instruments and Optical Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2668453\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Precision Instruments and Optical Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2668453","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Real-time warpage deformation monitoring using distributed optical fiber sensing
The warpage deformation of a silicon plate is monitored in real-time using distributed optical fiber and the influence of data resolution on the measurement result is studied. The experimental results show that this method has good accuracy and the relationship between data resolution and measurement error is non-linear.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
