扫描热显微镜校正方法

E. Guen, D. Renahy, M. Massoud, J. Bluet, P. Chapuis, S. Gomés
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引用次数: 1

摘要

本文分析了扫描热显微镜(SThM)探针与样品之间的传热。为了使用SThM技术进行定量测量,我们开发了完善的可重复的校准方法。本文提出了两种测量SThM的方法:一种是用Wollaston SThM微探针测量固体材料的导热性,另一种是用低掺杂硅纳米探针评估聚合物材料的相变温度。根据实验数据和模型结果的比较,我们估计微探针的局部分辨率与300 nm的半径有关。关于纳米探针,我们已经证明了测量对样品形貌和粗糙度的强烈依赖。
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Calibration methodologies for scanning thermal microscopy
This work analyses the heat transfer between various scanning thermal microscopy (SThM) probes and samples. In order to perform quantitative measurements with SThM techniques, we have developed well-established and reproducible calibration methodologies. We present here two approaches of the SThM measurement: one to measure thermal conductivity of solid materials with a Wollaston SThM microprobe and a second one to evaluate phase transition temperatures of polymeric materials with a silicon low-doped nanoprobe. Based on the comparison of experimental data and modeling results, we have estimated the local resolution of the microprobe to be associated to a radius of 300 nm. Concerning the nanoprobe, we have demonstrated the strong dependence of measurement on sample topography and roughness.
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