基于二极管的盐溶液传感器的研制

Li Fang Lai, N. Zainal, C. Soon
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摘要

高血压/高血压是马来西亚人的一个严重的医疗问题,可以通过监测盐/钠的摄入量来减少。一种方法是使用口腔内盐传感器;然而,这种口腔内的方法可能会引起不适,并且采用复杂和昂贵的制造工艺。因此,可以用作“汗液传感器”的外部可重复使用的电子设备在检测人体钠摄入量方面是首选的。本文设计并制作了一种基于电位二极管的盐溶液传感器,用于在外加电压作用下检测不同浓度的盐溶液。采用四种连续技术成功地设计和制作了p-n结二极管传感器;热湿氧化,光刻,热扩散和金属化。测量到二极管传感器的平均薄片电阻和电阻率分别为3.50 × 105±0.66 Ω⁄sq和3.05±0.5 Ωcm。该传感器具有理想的I-V二极管特性,在正向偏置条件下膝盖电压为11.5V,在反向偏置条件下击穿电压为-4 V。对于盐浓度检测,该传感器能够检测到盐浓度随电流的变化,最高可达45 mg/mL。
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Fabrication of A Diode-based Salt Solution Sensor
High blood pressure/hypertension is a severe medical issue among Malaysians that could be reduced by monitoring our salt/sodium intake. One way is to use intraoral salt sensor; this in-mouth method however may cause discomfort and adopts complex and costly fabrication processes. Hence, an external and reusable electronic device, that could be used as a “sweat-sensor”, is preferred in detecting the sodium intake of the body. In this study, a potentiometric diode-based salt solution sensor was designed and fabricated in order to detect different salt solution concentrations with applied external voltage. A p-n junction diode sensor was successfully designed and fabricated using four consecutive techniques; thermal wet oxidation, photolithography, thermal diffusion and metallization. The average sheet resistance and resistivity of the diode sensor were measured to be 3.50 x 105 ± 0.66 Ω⁄sq and 3.05 ± 0.5 Ωcm respectively. This sensor showed ideal I-V diode characteristics with a knee voltage of 11.5V in forward bias condition and breakdown voltage of -4 V in reverse bias condition. For salt concentration detection, the sensor was able to detect salt concentration changes with respect to current flow, up to 45 mg/mL.
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