用非导电光引发胶粘剂充填倒装芯片的新方法

M. Spiegel
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摘要

电子设备小型化的趋势有增无减。电子存储元件的日益复杂允许新的布局结构和设计的可能性,不断加强这一趋势。随着集成电路容量的增加,新的封装技术的重要性也在稳步增加,而倒装芯片技术已经成为一种具有市场价值的高效技术。当使用倒装芯片技术时,总是需要用树脂填充模具和衬底之间的间隙,也称为底料填充。由于热膨胀系数的不同,凸点与模具之间以及凸点与衬底之间都会出现应力。下填土可以减小或补偿这些应力。此外,它还保证了模具在基板上的机械稳定性。本文介绍了三种不同的底填料体系,它们采用三种不同的固化机理。这些全新的、部分独特的底填材料是在弹性单组分环氧树脂的基础上开发的,适用于各种载体基材,与目前市场上可用的系统相比,具有明显的优势。更多的注意力放在那些能够实现全新的下填充技术的下填充上,这些技术涉及通过一定波长和强度的光诱导预激活,甚至没有随后的热固化。该技术通过节约几个工艺步骤,开辟了大幅度降低倒装芯片工艺成本的新途径。
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Flip-chip underfilling with non-conductive photoinitiated adhesives - a new approach
The trend for miniaturisation in electronic equipment is continuing unabated. The increasing complexity of electronic memory components allows for new layout structures and design possibilities which constantly reinforce this trend. As IC capacity rises, new packaging technologies are also gaining steadily in importance, and flip-chip technology has established itself as a marketable and highly efficient technique. When flip-chip technology is used, there is always a need to fill the gap between die and substrate with a resin, also known as an underfill. Due to different coefficients of thermal expansion, stresses appear between bumps and die as well as between bumps and substrate. The underfill minimises or compensates these stresses. Additionally, it ensures the die's mechanical stability on the substrate. This paper presents three different underfiller systems which are cured by three different mechanisms. These completely new and partly unique underfilling materials have been developed on the basis of elastified, single component epoxy resins, and are suitable for a wide range of carrier substrates, offering obvious advantages compared with the systems available on the market at present. Greater attention is paid to those underfills which enable completely new underfilling techniques involving photoinduced pre-activation by light of a certain wavelength and intensity, even without subsequent heat curing. This technology opens up new ways of drastically cutting flip-chip process cost by economising on several process steps.
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Overview of conductive adhesive interconnection technologies for LCD's Impact of underfill filler particles on reliability of flip chip interconnects Adhesive flip chip bonding on flexible substrates Recent research and progress in photonic devices and materials Using a new photoimageable dielectric for PWB sequential build-up technology
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