脉冲激光沉积羟基磷灰石薄层的微观结构

D. Craciun, V. Craciun, C. Martin, I. Mihăilescu, M. Bunescu, E. Vasile, A. Ioncea, I. Boyd
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引用次数: 2

摘要

利用KrF准分子激光器(波长(λ) = 248 nm,脉冲持续时间(tau) = 20 ns),采用脉冲激光沉积(PLD)方法在Si、石英、Ti和Ge衬底上生长了羟基磷灰石(HAp)薄膜。为了优化Ca/P比和晶体结构,研究了激光沉积参数对生长层性能的影响。研究发现,保持Ca/P比的最佳条件,即高氧压力和低底物温度,与获得粘附层和结晶层的最佳条件,即低氧压力和高底物温度并不一致。对于沉积在Ti衬底上的薄膜,也发现较高的衬底温度促进Ti通过沉积膜扩散到表面,在那里它被氧化。在通过PLD获得高质量的hap涂层Ti植入物之前,需要进一步的研究。
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Microstructure of hydroxyapatite thin layers grown by pulsed laser deposition
Thin films of hydroxyapatite (HAp) have been grown on Si, quartz, Ti, and Ge substrates by the pulsed laser deposition (PLD) method employing a KrF excimer laser (wavelength (lambda) equals 248 nm, pulsed duration (tau) FWHM equals 20 ns). The influence of the laser deposition parameters on the properties of the grown layers was investigated in order to optimize the Ca/P ratio and the crystalline structure. It was found that the optimum conditions for preserving the Ca/P ratio i.e. high oxygen pressures and low substrate temperatures do not coincide with those for obtaining adherent and crystalline layers i.e. low oxygen pressures and high substrate temperatures. For films deposited onto Ti substrates it was also found that high substrate temperatures promote the diffusion of Ti through the depositing film up to the surface where it gets oxidized. Further investigations are required before high quality HAp-coated Ti implants by PLD can be obtained.
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