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引用次数: 11

摘要

所描述的仿真模型为增加对开发晶圆厂的理解提供了许多不同的机会。在分析模拟运行的结果时,必须理解随机性对模型的影响。可能需要多次随机数运行来确认模型结果。仿真模型可以解释晶圆、工具和操作人员之间的动态相互作用。各种统计数据可以用来更好地理解和解释模型结果。模拟提供了在不购买设备的情况下对晶圆厂进行试验的好处。以富士通为例,其产量一直在增加。该模型提供了支持更高生产水平所需的人员配置需求和新工具购置方面的信息。
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Capacity planning for development wafer fab expansion
The simulation model described offers many different opportunities for increasing understanding of a development wafer fab. The results of simulation runs must be analyzed with an understanding of the effect of randomness on the model. Multiple random number runs might be required to confirm a model result. Simulation models can account for dynamic interactions between wafers, tools and operators. The variety of statistics can be used to better understand and interpret the model results. Simulation provides the benefit of experimenting with the fab without buying equipment. In the case of Fujitsu, production volumes were increasing. The model provided information on staffing requirements and new tool acquisitions required to support higher levels of production.
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