K. Nowak, T. Suganuma, Y. Kurosawa, T. Ohta, Y. Kawasuji, H. Nakarai, Takashi Saitou, J. Fujimoto, H. Mizoguchi, A. Sumitani, A. Endo
{"title":"QCL种子,ns脉冲,多线,CO2激光振荡器用于激光产生的等离子体极紫外源","authors":"K. Nowak, T. Suganuma, Y. Kurosawa, T. Ohta, Y. Kawasuji, H. Nakarai, Takashi Saitou, J. Fujimoto, H. Mizoguchi, A. Sumitani, A. Endo","doi":"10.1117/12.2256003","DOIUrl":null,"url":null,"abstract":"Successful merger of state-of-the-art, semiconductor quantum-cascade lasers (QCL), with the mature CO2 laser technology, resulted in a delivery of highly-desired qualities of CO2 laser output that were not available previously without much effort. These qualities, such as multi-line operation, excellent spectro-temporal stability and pulse waveform control, became available from a single device of moderate complexity. This paper describes the operation principle and the unique properties of the solid{state seeded CO2 laser, invented for an application in laser-produced-plasma (LPP), extreme-UV (EUV) light source.","PeriodicalId":293926,"journal":{"name":"International Symposium on High Power Laser Systems and Applications","volume":"63 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-01-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"QCL seeded, ns-pulse, multi-line, CO2 laser oscillator for laser-produced-plasma extreme-UV source\",\"authors\":\"K. Nowak, T. Suganuma, Y. Kurosawa, T. Ohta, Y. Kawasuji, H. Nakarai, Takashi Saitou, J. Fujimoto, H. Mizoguchi, A. Sumitani, A. Endo\",\"doi\":\"10.1117/12.2256003\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Successful merger of state-of-the-art, semiconductor quantum-cascade lasers (QCL), with the mature CO2 laser technology, resulted in a delivery of highly-desired qualities of CO2 laser output that were not available previously without much effort. These qualities, such as multi-line operation, excellent spectro-temporal stability and pulse waveform control, became available from a single device of moderate complexity. This paper describes the operation principle and the unique properties of the solid{state seeded CO2 laser, invented for an application in laser-produced-plasma (LPP), extreme-UV (EUV) light source.\",\"PeriodicalId\":293926,\"journal\":{\"name\":\"International Symposium on High Power Laser Systems and Applications\",\"volume\":\"63 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-01-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Symposium on High Power Laser Systems and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2256003\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on High Power Laser Systems and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2256003","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
QCL seeded, ns-pulse, multi-line, CO2 laser oscillator for laser-produced-plasma extreme-UV source
Successful merger of state-of-the-art, semiconductor quantum-cascade lasers (QCL), with the mature CO2 laser technology, resulted in a delivery of highly-desired qualities of CO2 laser output that were not available previously without much effort. These qualities, such as multi-line operation, excellent spectro-temporal stability and pulse waveform control, became available from a single device of moderate complexity. This paper describes the operation principle and the unique properties of the solid{state seeded CO2 laser, invented for an application in laser-produced-plasma (LPP), extreme-UV (EUV) light source.