QCL种子,ns脉冲,多线,CO2激光振荡器用于激光产生的等离子体极紫外源

K. Nowak, T. Suganuma, Y. Kurosawa, T. Ohta, Y. Kawasuji, H. Nakarai, Takashi Saitou, J. Fujimoto, H. Mizoguchi, A. Sumitani, A. Endo
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引用次数: 1

摘要

最先进的半导体量子级联激光器(QCL)与成熟的CO2激光技术的成功合并,导致了以前不需要太多努力就能获得的高质量CO2激光输出的交付。这些特性,如多线操作,优异的光谱-时间稳定性和脉冲波形控制,可以从一个中等复杂性的单一设备中获得。本文介绍了用于激光产生等离子体(LPP)、极紫外(EUV)光源的固态种子型CO2激光器的工作原理和独特性能。
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QCL seeded, ns-pulse, multi-line, CO2 laser oscillator for laser-produced-plasma extreme-UV source
Successful merger of state-of-the-art, semiconductor quantum-cascade lasers (QCL), with the mature CO2 laser technology, resulted in a delivery of highly-desired qualities of CO2 laser output that were not available previously without much effort. These qualities, such as multi-line operation, excellent spectro-temporal stability and pulse waveform control, became available from a single device of moderate complexity. This paper describes the operation principle and the unique properties of the solid{state seeded CO2 laser, invented for an application in laser-produced-plasma (LPP), extreme-UV (EUV) light source.
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