微波和毫米波晶圆晶体管表征能力和HFET CAD模型提取技术

P. Tasker
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引用次数: 0

摘要

在过去的五到十年中,微波和毫米波频率的测量能力以及测量数据分析都取得了相当大的进步。这导致了相当大的改进技术,直接提取准确的CAD为基础的模型。s参数测量现在可以在高达120 GHz的晶圆上执行,允许提取适用于毫米波频率的小信号CAD模型。这导致实现了高性能,在110 GHz, 20 dB增益,毫米波系统应用的mmic。优化测量系统的噪声参数测量在微波频率已经证明。结合改进的CAD模型,这些也允许噪声参数精确外推到毫米波频率。在非线性表征领域,虽然局限于微波频率,但目前正在开发新的复杂测量系统。这些系统在时域内工作,因此不仅可以测量射频输入和输出功率,还可以测量射频输入和输出电压和电流波形。这些信息有助于提高对非线性晶体管动态行为的理解,也有助于提取准确的非线性模型。
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Microwave and millimeter wave on-wafer transistor characterization capabilities and HFET CAD model extraction techniques
In the past five to ten years there has been considerable advancement both in measurement capabilities at microwave and millimeter wave frequencies and in measurement data analysis. This has resulted in considerable improvements in the techniques for direct extraction of accurate CAD based models. S-parameter measurements can now be performed on-wafer up to 120 GHz allowing for the extraction of small signal CAD models valid to millimeter wave frequencies. This has resulted in the realization of high performance, 20 dB gain at 110 GHz, MMICs for millimeter wave system applications. Optimized measurements systems for noise parameter measurement at microwave frequencies have been demonstrated. Combined with improved CAD models these also allow for the accurate extrapolation of noise parameters to millimeter wave frequencies. In the area of non-linear characterization, while confined to microwave frequencies, new sophisticated measurement systems are presently being developed. These systems operate in the time domain, thus allowing for measurement not only of RF input and output power but also the RF input and output voltage and current waveforms. This information is leading both to an improved understanding of non-linear transistor dynamic behavior and also to the extraction of accurate non-linear models.
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