{"title":"使用触觉轮廓测量法和多波长干涉测量法测量自由形状和复杂几何形状","authors":"M. Wendel","doi":"10.1117/12.2526734","DOIUrl":null,"url":null,"abstract":"A comparison of two different measurement approaches, a tactile profilometer as well as a non-contact point-probe based metrology system, is conducted. The properties of each approach are highlighted, and measurement results examined.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Measurement of freeforms and complex geometries by use of tactile profilometry and multi-wavelength interferometry\",\"authors\":\"M. Wendel\",\"doi\":\"10.1117/12.2526734\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A comparison of two different measurement approaches, a tactile profilometer as well as a non-contact point-probe based metrology system, is conducted. The properties of each approach are highlighted, and measurement results examined.\",\"PeriodicalId\":422212,\"journal\":{\"name\":\"Precision Optics Manufacturing\",\"volume\":\"48 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Precision Optics Manufacturing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2526734\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Optics Manufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2526734","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Measurement of freeforms and complex geometries by use of tactile profilometry and multi-wavelength interferometry
A comparison of two different measurement approaches, a tactile profilometer as well as a non-contact point-probe based metrology system, is conducted. The properties of each approach are highlighted, and measurement results examined.
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