AlxGa1-xN薄膜能带隙与al摩尔分数的关系

S. Ng, F. Yam, Z. Hassan, H. Abu Hassan
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引用次数: 1

摘要

本文研究了Al摩尔分数对蓝宝石衬底生长的AlxGa1-xN薄膜能带隙(Eg)的影响。重点关注富Ga成分样品(0 les x < 0.10)。采用高分辨率x射线衍射(HR-XRD)光谱法测定了铝摩尔分数。采用紫外-可见(UV-VIS)透射光谱和微光致发光(mu-PL)光谱测定样品的能带隙。XRD结果表明,随着al摩尔分数的增加,摇摆曲线(RC)峰的Bragg角逐渐增大,表明合金的晶格常数c降低。应用维加德定律,计算了AlxGa1-xN样品的al -摩尔分数。综上所述,UV-VIS透射和mu-PL结果表明,随着al摩尔分数的增加,所有样品的吸收边和带边发射都发生了蓝移。这表明AlxGa1-xN的带隙能与al摩尔分数有很强的相关性。最后,绘制了AlxGa1-xN的带隙能量随al摩尔分数的函数图,并将紫外-可见透射率的非线性插值与PL数据进行最佳拟合,得到带隙弯曲参数为14.62 eV。
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The Energy Band Gap of AlxGa1-xN Thin Films as a Function of Al-Mole Fraction
In this work, the effects of Al mole fraction on energy band gap (Eg) of AlxGa1-xN epilayers grown on sapphire substrate are investigated. Attention is focused on the Ga- rich composition samples (0 les x < 0.10). The Al-mole fraction is determined by high- resolution X-ray diffraction (HR-XRD) spectroscopy. Ultraviolet-visible (UV-VIS) transmission and micro-photoluminescence (mu-PL) spectroscopy are employed to determine the energy band gap of the samples. The XRD results revealed that the Bragg angle of the rocking curve (RC) peak gradually increases as the Al-mole fraction increases, indicating the reductions in the lattice constant c of the alloys. By the application of Vegard's law, the Al-mole fractions of AlxGa1-xN samples have been calculated. Overall, the UV-VIS transmission and mu-PL results showed that as the Al-mole fraction increases, blue shifts of the absorption edge and band edge emission are observed in all samples. These indicate the strong dependence of the band gap energy of AlxGa1-xN on the Al-mole fraction. Finally, the band gap energy of the AlxGa1-xN as a function of Al-mole fraction have been plotted and the energy band gap bowing parameter of 14.62 eV is obtained from the best fit of the non-linear interpolation of the UV-VIS transmission and the PL data.
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