基于mems的压电微泵，用于精确的液体处理

2012 International Conference on System Engineering and Technology (ICSET) Pub Date : 2012-10-25 DOI:10.1109/ICSENGT.2012.6339327

J. Johari, B. Majlis

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引用次数: 3

摘要

描述了一种微型泵，它使用压电致动器，即使在高负载水平(高输出压力)下，也能以接近nl min-1的体积流量从泵脉动中输送液体。这种微型泵使用双晶片，当电压施加到压电致动器时，双晶片会弯曲。通过在装置中插入阀门，泵可以连续运行，泵腔驱动电压的频率决定了泵的容积泵速。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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MEMS-based piezoelectric micropump for precise liquid handling

A micropump is described which uses a piezoelectric actuator to deliver liquid from pump pulsations at volumetric flow rates approaching nl min-1 even at high loading levels (high output pressures). This micropump uses a bimorph which bends when a voltage is applied to the piezo-actuator. By inserting valves into the device, the pump can operate continuously with volumetric pumping rate determined by the frequency of the driving voltage to the pump chamber.

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2012 International Conference on System Engineering and Technology (ICSET)

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