在应变p - mosfet中使用双通道异质结构的重要性

Amine Mohammed Taberkit, A. Guen-Bouazza, Mohamed Horch
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引用次数: 2

摘要

本文提出了一种双通道异质结构应变结构,介绍了异质结构器件中期待的高载流子迁移率,并利用CVT、SHIRAHATA和WATT模型对双应变通道异质结构p - mosfet进行了二维仿真。本研究是利用SILVACO-TCAD仿真软件完成的,通过对应变技术在p型MOSFET晶体管上的应用效果的比较,可以说明应变技术在双沟道异质结构MOSFET中的重要性。制造步骤的模拟和电子特性的提取在转移和输出特性、跨导和准静态电容方面允许理解和解释这些增强。
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The importance of using dual channel heterostructure in strained P-MOSFETs
We present in this work a dual channel heterostructure strained structure, introduce the high carrier mobility Awaited in heterostructure devices while using several models which are: CVT, SHIRAHATA and WATT, we present a two dimensional simulation of dual strained channel heterostructure P-MOSFETs. This study is accomplished using SILVACO-TCAD simulation software, the comparison of the effect of using strain technique on P-MOSFET transistors will demonstrate the importance of using strain technique especially in dual channel heterostructure MOSFET. The simulation of fabrication steps and the extraction of the electronic proprieties in terms of transfer and output characteristics, transconductance, and the quasi-static capacitance allow understanding and interpreting these enhancements.
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