Bioinspired Solutions for MEMS Tribology

Micro-electro mechanical systems (MEMS) are miniaturized devices that operate at a small scale. Actuators-based MEMS have not been commercially realized yet, owing to the manifestation of high surface forces such as adhesion and friction between their moving elements. In recent years, inspiration from “Lotus Effect” has opened a new direction in the field of micro/nano-tribology to manipulate/control surface forces at small scale. The underlying principle discovered from the super-hydrophobic nature of the leaves of water-repellent plants has led to the design and development of various biomimetic tribological surfaces that exhibit remarkable reduction in surface forces under tribological contact. This chapter presents the tribological issues in MEMS devices, examples of conventional solutions for the tribological issues, and unique bioinspired solutions that have great capability to mitigate surface forces at micro/nano-scales.