用铂/钨纳米线组装功能纳米器件

Zhan Yang, M. Nakajima, T. Fukuda
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引用次数: 0

摘要

本文采用双金属纳米线预制了一种功能器件。电极采用PZT悬臂梁,经FIB刻蚀。将两个碳纳米管(CNT)组装在PZT悬臂梁的分离电极上。利用聚焦离子束(FIB)将钨探针蚀刻成直径为300 nm、长度为25.4 μm的材料。然后在探针上涂上一层聚对二甲苯,并切割尖端以打开钨。在场发射电子显微镜下,分别引入六加羰基钨和三甲基环戊二烯基铂,通过场发射从CNTs的尖端生长出长度为907nm的钨纳米线和长度为209 nm的铂纳米线。
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Assembly of functional nanodebice using platinum/ tungsten nanowire
This paper presets the assembly of a functional device with double metal nanowire. A PZT cantilever was used for electrodes of the device and etched by FIB. Two carbon nanotubes (CNT) were assembled to the separated electrodes of PZT cantilever. A tungsten probe is etched by focused ion beam (FIB) into 300 nm in diameter and 25.4 μm in length. Then the probe is coated by parylene and cut the tip to open the tungsten. A tungsten nanowire with 907nm in length and a platinum nanowire with 209 nm in length grew from the tip of the CNTs via field emission by introducing hexacabonyl tungsten and trimethyl cyclopentadienyl platinum individually inside a field emission electron microscope.
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