双偏振态相干扫描干涉测量

Pavel Pavlíček, J. Kučera, N. Hagen, Y. Otani
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引用次数: 0

摘要

相干扫描干涉测量(CSI)是一种精确、通用的测量粗糙和光滑表面物体形状的方法。然而,这种方法需要大量的原始数据。提高测量速度和相机分辨率的要求要求减少相机帧数。我们提出了一种评估技术,可以直接重建干涉图包络。在干涉仪的参考臂上插入一个八角波片。这样就产生了两个信号,每个信号对应一个极化状态,它们相互移位90度。从这两个信号中,直接重建干涉图包络是可能的。
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Coherence scanning interferometry with two polarization states
Coherence scanning interferometry (CSI) is a precise and versatile method to measure the shape of objects with rough and smooth surface. However, this method requires a large amount of raw data. The demands on increasing measurement speed and camera resolution require to reduce the number of camera frames. We present an evaluation technique that allows a direct reconstruction of the interferograms envelope. An octadical wave plate is inserted into the reference arm of the interferometer. Thus two signals arise, each for one polarization state, that are shifted by 90 degrees to each other. From the two signals, a direct reconstruction of the interferograms envelope is possible.
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