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Ultra-precise surface machining of N-BK7 using microwave-driven reactive plasma jet machining 微波驱动反应等离子体射流加工N-BK7超精密表面
Pub Date : 2019-12-30 DOI: 10.1117/12.2547617
Faezeh Kazemi, G. Boehm, T. Arnold
Chemically reactive Plasma Jet Machining (PJM) is a contactless and efficient surface machining technique increasingly applied to the surface shape generation and error correction of various optical elements. However, the application of fluorine-based PJM to surface machining of N-BK7® is challenging since the chemical interaction between reactive plasma species and metal components of N-BK7 induces a residual layer in the contact zone and surrounding of the plasma-treated area. It was noticed that a residual layer degrades the ability of obtaining the prerequisite surface profile and causes a nonlinear and hardly predictable removal behavior with respect to the etching time. In this paper, extensive studies are conducted for relaxing constraints in applying the fluorine-based PJM to the surface machining of N-BK7, particularly regarding to the manufacture of freeform optical elements. In this regard, the chemical composition of residual layer is evaluated by using SEM/EDX analysis aiming at clarifying the chemical kinetics between plasma generated active particles and the N-BK7 surface atoms. Furthermore, the etching behavior of N-BK7 is compared with Fused Silica to verify the optimality of obtained results. Finally, the area machining is tested at different plasma dwell times to evaluate the predictability and regularity of results.
化学反应等离子体喷射加工(PJM)是一种非接触、高效的表面加工技术,越来越多地应用于各种光学元件的表面形状生成和误差校正。然而,将氟基PJM应用于N-BK7®的表面加工是具有挑战性的,因为反应等离子体与N-BK7的金属成分之间的化学相互作用会在等离子体处理区域的接触区和周围产生残留层。注意到残余层降低了获得必要表面轮廓的能力,并导致与蚀刻时间有关的非线性和难以预测的去除行为。本文对氟基PJM在N-BK7表面加工中的应用进行了广泛的研究,特别是在自由曲面光学元件的制造方面。为此,利用SEM/EDX分析对残余层的化学成分进行了评价,旨在阐明等离子体产生的活性粒子与N-BK7表面原子之间的化学动力学。此外,将N-BK7的蚀刻行为与熔融二氧化硅进行了比较,验证了所得结果的最优性。最后,在不同的等离子体停留时间下对区域加工进行了测试,以评估结果的可预测性和规律性。
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引用次数: 4
Machining vibration and methods of their measurement 加工振动及其测量方法
Pub Date : 2019-12-30 DOI: 10.1117/12.2542816
M. Špína, J. Benes, F. Procháska, O. Matousek
Today, aspherical elements have become an indispensable part of modern high-precision optical assemblies. Several kinds of defects arise during their manufacture. As far as very precise aspherical surfaces are concerned, mid-spatial frequencies are probably the most important issue. This type of imperfection fills the gap between shape (low-spatial frequencies) and microroughness (high-spatial frequencies). A smaller part of these defects arise during polishing; however, more of them are generated during the grinding process. Due to the interference of different controlling frequencies in the machine and imperfections in the constructional solution of the grinding machine, defects occur on the optical surface, which deform it. The periods of these defects usually lie in an interval of 0.5 to 10 mm, depending on the parameters of the machining process. To prevent the generation of these structures, a comprehensive measurement of the sources and transmission of vibrations was realised using the measuring device VibXpert II. The measurement was made on the grinding machine Optotech MCG 100 CNC. Several simulations of different types of processes were realised and the measurement was also subsequently performed during a real grinding process of aspherical optical surfaces. The data acquired from the measurement of vibrations were mathematically processed in frequency space. The experiment revealed several reasons for these defects.
如今,非球面元件已成为现代高精度光学组件中不可缺少的一部分。在制造过程中会出现几种缺陷。就非常精确的非球面而言,中空间频率可能是最重要的问题。这种类型的缺陷填补了形状(低空间频率)和微粗糙度(高空间频率)之间的差距。这些缺陷的一小部分是在抛光过程中产生的;然而,更多的是在磨削过程中产生的。由于机床内不同控制频率的干扰和磨床结构方案的不完善,导致光学表面产生缺陷,使其变形。这些缺陷的周期通常在0.5到10mm之间,这取决于加工过程的参数。为了防止这些结构的产生,使用测量设备VibXpert II实现了对振动源和传播的全面测量。测量在Optotech MCG 100 CNC磨床上进行。实现了几种不同类型加工过程的模拟,并随后在非球面光学表面的实际磨削过程中进行了测量。从振动测量中获得的数据在频率空间中进行数学处理。实验揭示了造成这些缺陷的几个原因。
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引用次数: 0
Study of the influence of focal position on back-reflected radiation during deep penetration laser welding and its simulation 深熔激光焊接中焦点位置对反向反射辐射的影响及其仿真研究
Pub Date : 2019-12-30 DOI: 10.1117/12.2542806
P. Horník, M. Šarbort, Hana Šebestová, L. Mrňa
A penetration laser welding mode characterized by formation of keyhole is often used. A small portion of the laser beam is reflected back from the keyhole and returned to the laser through the optical system of the welding head and optical fiber. The reflected radiation is monitored in the laser for the safety of the optical resonator and its signal can be read and used for process monitoring. The experiment was conducted to relate the intensity of the back-reflected radiation with depth and width of the weld for the variable focal position. The experiments were performed for two variants of the optical focusing system and materials with different thermo-physical properties - carbon steel and stainless steel. Furthermore, a mathematical model for back-reflected radiation was created using ray tracing. The shape of the keyhole was approximated as an inclined conical cavity. The results of the simulation were compared with experimentally measured data and it was found that the proposed model is most suitable for the description of stainless steel.
通常采用以形成锁孔为特征的熔透激光焊接方式。一小部分激光束从锁孔反射回来,并通过焊接头和光纤的光学系统返回激光器。为了保证光谐振腔的安全,对激光器中的反射辐射进行监测,其信号可被读取并用于过程监测。在变焦位置下,进行了背反射辐射强度与焊缝深度和宽度的关系实验。用两种不同的光学聚焦系统和不同热物理性能的材料——碳钢和不锈钢进行了实验。此外,利用光线追踪技术建立了背向反射辐射的数学模型。钥匙孔的形状近似为一个倾斜的锥形腔。将模拟结果与实验测量数据进行了比较,发现所提出的模型最适合于对不锈钢的描述。
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引用次数: 1
Mobile LIDT
Pub Date : 2019-12-30 DOI: 10.1117/12.2542776
Martin Mydlář, J. Vanda, M. Mureșan, P. Čech, J. Brajer, T. Mocek
Laser Induced Damage Threshold (LIDT) is an important property of laser system components. It is obtained as a statistical value from controlled experiments and defines the maximum optical intensity, which does not cause damage to certain components. Correlation between maximum optical intensity, beam pulse length and focal spot size provides a unique characterization of a specimen. Some specimen requires conditions or environment unreachable in stationary setup, therefore a lighten, portable, version of testing setup may be used with proper source and surroundings. The advantage of the mobile LIDT station is access to different laser systems with variety of beam properties (repetition rate, pulse length, etc). In following paper were investigated accuracy of measurements done by the mobile LIDT station and copared to stationary, ISO compliant LIDT station measurements as reference.
激光诱导损伤阈值(LIDT)是激光系统部件的一项重要性能。它是从受控实验中获得的统计值,并定义了最大光强,该光强不会对某些部件造成损坏。最大光强、光束脉冲长度和焦点光斑大小之间的相关性提供了样品的独特特征。有些样品需要固定装置无法达到的条件或环境,因此可以使用轻便的便携式测试装置,并配备适当的源和环境。移动LIDT站的优点是可以访问具有各种光束特性(重复率、脉冲长度等)的不同激光系统。本文研究了移动LIDT站测量的精度,并将其与固定的、符合ISO标准的LIDT站测量作为参考进行了比较。
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引用次数: 0
Investigations of dental cavities: between x-ray radiography and OCT 龋齿的调查:x线摄影与OCT的比较
Pub Date : 2019-12-30 DOI: 10.1117/12.2542904
Ralph-Alexandru Erdelyi, Virgil-Florin Duma, G. Dobre, A. Bradu, A. Podoleanu
Nowadays in dentistry a correct diagnosis is given only after a clinical and radiological evaluation. Radiographs are also required for treatment assessments. The aim of this study is to present results obtained on evaluating dental cavities in a dental clinic in Western Romania, using both X-ray radiography and Optical Coherence Tomography (OCT). The most common methods for daily-basis clinical imaging are utilized, i.e. panoramic radiography and three-dimensional (3D) cone beam computed tomography (CBCT). Advantages of OCT as an imaging method in dentistry are discussed: it avoids exposing the patient to X-ray radiation, and image resolution of OCT is superior. This led us to test this technique for dental assessments and see how it can work in conjunction with radiography. The study also provides upsides and downsides of both medical imaging techniques. Panoramic radiographs and 3D CBCT to several extracted teeth are performed. Dedicated toolbars from Romexis software (Planmeca, Helsinki, Finland) are analyzed with regard to their capability to make precise measurements. Processing of images are made to obtain a high-quality; measurements are done and data are collected. The same teeth are scanned with an in-house developed SS-OCT system. Images from both investigations are presented, and clinical conclusions are drawn. For dental issues (i.e., cavities) that appear on the surface of the teeth, OCT proves to be more suitable than radiographs; it is also more accurate and radiation-free.
现在在牙科中,只有经过临床和放射学评估才能作出正确的诊断。治疗评估也需要x光片。本研究的目的是介绍在罗马尼亚西部牙科诊所评估龋齿的结果,使用x射线摄影和光学相干断层扫描(OCT)。最常用的日常临床成像方法,即全景放射摄影和三维(3D)锥束计算机断层扫描(CBCT)。讨论了OCT作为一种牙科成像方法的优点:它避免了患者暴露于x射线辐射,并且OCT的图像分辨率优越。这让我们在牙科评估中测试了这项技术,看看它如何与放射照相相结合。该研究还提供了这两种医学成像技术的优点和缺点。对几颗拔牙进行全景x线片和三维CBCT检查。分析了Romexis软件(Planmeca, Helsinki, Finland)的专用工具栏进行精确测量的能力。对图像进行处理以获得高质量的图像;测量完成并收集数据。用内部开发的SS-OCT系统扫描相同的牙齿。从这两个调查的图像提出,并得出临床结论。对于出现在牙齿表面的牙齿问题(即蛀牙),OCT被证明比x光片更合适;它也更精确和无辐射。
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引用次数: 4
Measurement of small optics by use of a multi-wavelength interferometrical approach 用多波长干涉法测量小型光学器件
Pub Date : 2019-12-30 DOI: 10.1117/12.2542914
M. Wendel
A new approach for measurement of small and thin lenses is introduced, based on the combination of long and short coherence interferometrical point probe systems in one measurement device. The basic working principle, as well as first results, are presented, and the benefits of this approach are highlighted.
介绍了一种基于长、短相干干涉点探头系统在同一测量装置中的组合测量小透镜和薄透镜的新方法。介绍了基本工作原理和初步结果,并强调了这种方法的好处。
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引用次数: 1
Preliminary design of longitudinal chromatic aberration sensor implemented to laser processing head 应用于激光加工头的纵向色差传感器初步设计
Pub Date : 2019-12-30 DOI: 10.1117/12.2542409
M. Ćwikła, A. Zakrzewski, P. Koruba, P. Jurewicz, J. Reiner
The problem of process monitoring is one of the most critical aspects of control in laser material processing. Chromatic sensors, which are characterized by high resolution, relatively large measurement range and good repeatability, may be used for measuring and adjusting the distance between laser head and the substrate. In this paper we propose a new solution of chromatic sensor integrated with optical laser head via an available standard monitoring port. Optical components of laser heads are fabricated from materials characterized by high Abbe number (low range of longitudinal chromatic aberration). Therefore, for sensors application, the resulting chromatic aberration of the overall optical system should be enhanced by implementation the sets of lens described by a low value of Abbe. The numerical analysis were carried out in order to design an optical system of proposed solution, which will be described by wide measurement range, low attenuation and narrow characteristic spectral peak. The results obtained by WinLens software solutions were presented. The numerical tool whose principle of operation is based on geometric optics equations, was chosen for rapid prototyping because of its simplicity in implementation of optical components. The results from the numerical analysis were afterwards confirmed by the experiment on real optical system.
过程监控问题是激光材料加工控制的关键问题之一。彩色传感器具有分辨率高、测量范围大、重复性好等特点,可用于测量和调节激光头与衬底之间的距离。本文提出了一种利用标准监测端口将色度传感器与光学激光头集成的新方案。激光头的光学元件是由具有高阿贝数(低纵向色差范围)的材料制成的。因此,对于传感器的应用,所产生的整个光学系统的色差应该通过实现由阿贝的低值描述的透镜组来增强。为了设计出测量范围宽、衰减小、特征谱峰窄的光学系统,对该方案进行了数值分析。介绍了用WinLens软件求解得到的结果。选择基于几何光学方程的数值工具进行快速成型,因为其实现简单。数值分析的结果在实际光学系统上得到了验证。
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引用次数: 2
Photometry of exoplanet transits and their regular monitoring 系外行星凌日的光度测定及其定期监测
Pub Date : 2019-12-30 DOI: 10.1117/12.2543153
P. Pintr, David Vápenka, Z. Rail
We report photometric measurements of selected exoplanet transits from the archive of the TOPTEC telescope, operated by our team at an observatory Horní Halže, near Klášterec nad Ohří, Czech Republic. We have compared measured geometry with catalogue geometry of selected exoplanetary systems. We have found a candidate for potential system with new non-transiting planet with the help of an archive TRESCA.
我们报告了在捷克共和国Klášterec nad Ohří附近的天文台Horní Halže,由我们的团队操作的TOPTEC望远镜档案中选定的系外行星凌日的光度测量结果。我们将测量的几何形状与选定的系外行星系统的目录几何形状进行了比较。在TRESCA档案的帮助下,我们发现了一个具有新的非凌日行星的潜在系统候选者。
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引用次数: 0
Ion beam figuring with using Einzel lens 用艾因泽尔透镜计算离子束
Pub Date : 2019-12-30 DOI: 10.1117/12.2542822
V. Karabyn, J. Polák, F. Procháska, R. Melich
Ion Beam Figuring (IBF) has been used for nearly 20 years by several laboratories and companies as a highly deterministic method of final processing of ultra-precision optical elements. Nowadays, requirements for high precision optics demand to have full control over the ion beam, which includes both the ion beam profile and intensity. Electrostatic focusing using an Einzel lens setup provides a simple option to control the ion beam shape by changing voltage. This experimental study investigates the early stage development of an Einzel lens used to control an RF40 ion source. First results demonstrate the possibility to use an Einzel lens to control the ion beam profile and indicate possible future challenges this technology has to overcome when used in IBF machines.
离子束计算(IBF)作为一种高精度光学元件最终加工的高确定性方法,已经被一些实验室和公司使用了近20年。目前,高精度光学要求对离子束进行完全控制,包括离子束的轮廓和强度。静电聚焦使用Einzel透镜设置提供了一个简单的选择,通过改变电压来控制离子束的形状。本实验研究探讨了用于控制RF40离子源的Einzel透镜的早期发展。第一个结果证明了使用Einzel透镜来控制离子束轮廓的可能性,并指出了该技术在IBF机器中使用时可能要克服的挑战。
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引用次数: 0
Measurement of mechanical properties of GRIN rod lens GRIN杆透镜力学性能的测量
Pub Date : 2019-12-30 DOI: 10.1117/12.2542913
J. Hošek, S. Nemcová
The GRIN rod lenses are favorable optical elements for the image transmission in applications where transverse dimensions of the optical system are limited such as rigid borescopes or endoscopes. Flexible versions of these instruments usually use imaging bundles of optical fibers to assure both the mechanical elasticity and the optical transmission. The image resolution of this solution suffers from being limited by minimum fiber core diameter allowable for imaging and total number of fibers in a given cross-section area. GRIN rod lens allows for a higher image resolution for small diameters. While the optical properties of the GRIN rod lens are well known, there is no information about its allowed mechanical stress. In this paper we present a simple system for load and deformation measurement of a GRIN rod lens aimed to be used for a miniature endoscope for eye surgery operation. The system allows for loading force measurement with a deformation strain gauge cell and deformation measurement with an optical triangulation sensor. The paper presents deformation limits of the tested GRIN rod lens loaded by a three-point bending test. We also evaluated the Young modulus of the GRIN rod lens material from the measured data. Our data shows that tested GRIN lenses can be statically deformed by bending down to minimum radius 105 mm without braking.
在光学系统横向尺寸有限的应用场合,如刚性内窥镜或内窥镜,GRIN棒透镜是图像传输的有利光学元件。这些仪器的柔性版本通常使用光纤成像束来保证机械弹性和光传输。该解决方案的图像分辨率受到成像允许的最小光纤芯直径和给定横截面面积内光纤总数的限制。GRIN杆镜头允许小直径更高的图像分辨率。虽然GRIN杆透镜的光学特性是众所周知的,但没有关于其允许的机械应力的信息。本文介绍了一种用于微型眼科内窥镜的GRIN棒透镜的载荷和变形测量系统。该系统允许使用变形应变计单元进行加载力测量和使用光学三角测量传感器进行变形测量。通过三点弯曲试验,给出了所测GRIN杆透镜的变形极限。我们还从测量数据中评估了GRIN棒透镜材料的杨氏模量。我们的数据表明,经过测试的GRIN透镜可以在没有制动的情况下弯曲到最小半径105毫米。
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引用次数: 0
期刊
Optical Angular Momentum
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