基于线性方程组的子孔径拼接计算时间优化

M. Stašík
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引用次数: 1

摘要

由于多种原因,使用干涉测量法测量单孔径的大型或非球面光学表面是有问题的。典型的问题是干涉仪透射元件的数值孔径限制。非球面也是有问题的,由于一个显著的形状偏差从照明波前。这种偏差通常会导致相机上的渐晕和空间混叠。一种解决方案是子孔径测量和随后的子孔径拼接。拼接算法的原理是利用子孔径之间的重叠来消除每个子孔径的像差,从而得到一个全孔径,供进一步分析。这一过程计算量大,为了在合理的时间内得到结果,必须对其进行优化。本文用泽尼克多项式描述了考虑的像差,提出了基于线性方程组的拼接方法,并对其进行了数学描述。用QED ASI在球面上的实测数据对该方法进行了实际验证,并给出了结果。对结果的拼接质量进行量化,并与其他拼接方法进行比较。
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Sub-aperture stitching computation time optimization using linear equations system
Measurement of large or aspheric optical surfaces shape as single aperture using interferometry is problematic due multiple reasons. Typical problem is numerical aperture limitation of the interferometer transmission element. Aspheric surfaces are also problematic due a significant shape deviation from the illumination wavefront. This deviation typically causes vignetting and spatial aliasing on the camera. A solution is sub-aperture measurement and subsequent subaperture stitching. A stitching algorithm in principle uses overlaps between sub-apertures to eliminate aberrations of each sub-aperture to obtain a full-aperture for further analysis. This process is computation time demanding and an optimization has to be implemented in order to obtain result in reasonable time. In this paper, descriptions of considered aberrations using Zernike polynomials are presented and the stitching method based on linear equation system is proposed and it is mathematically described. The method was practically tested with real data measured on spherical surfaces using QED ASI and the results are presented. Stitching quality was quantified for results and compared to other stitching methods.
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