Han Zhou, Bingkun Wu, Mingguang Shan, Lei Liu, Haichao Yu, Z. Zhong, Bin Liu
{"title":"基于大PDMS膜片的光纤法布里-珀罗声传感器","authors":"Han Zhou, Bingkun Wu, Mingguang Shan, Lei Liu, Haichao Yu, Z. Zhong, Bin Liu","doi":"10.1117/12.2511691","DOIUrl":null,"url":null,"abstract":"An extrinsic Fabry-Perot interferometric fibre microphone based on polydimethylsiloxane, or PDMS, diaphragm was proposed. The large free-standing PDMS diaphragm, with a diameter of 4 mm, is prepared by a simple “spin-strip” process. The experimental result shows that the fabricated sensor has a high dynamic pressure sensitivity of about -136 dB re 1 rad/μPa in the range of 100~2000Hz. The noise equivalent acoustic signal level of the microphone, limited by the environmental noise, is about 1000 μPa/Hz1/2. And the dynamic range is tested to be more than 47.48 dB. The proposed microphone is expected to be used in the field of weak acoustic pressure testing.","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm\",\"authors\":\"Han Zhou, Bingkun Wu, Mingguang Shan, Lei Liu, Haichao Yu, Z. Zhong, Bin Liu\",\"doi\":\"10.1117/12.2511691\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An extrinsic Fabry-Perot interferometric fibre microphone based on polydimethylsiloxane, or PDMS, diaphragm was proposed. The large free-standing PDMS diaphragm, with a diameter of 4 mm, is prepared by a simple “spin-strip” process. The experimental result shows that the fabricated sensor has a high dynamic pressure sensitivity of about -136 dB re 1 rad/μPa in the range of 100~2000Hz. The noise equivalent acoustic signal level of the microphone, limited by the environmental noise, is about 1000 μPa/Hz1/2. And the dynamic range is tested to be more than 47.48 dB. The proposed microphone is expected to be used in the field of weak acoustic pressure testing.\",\"PeriodicalId\":115119,\"journal\":{\"name\":\"International Symposium on Precision Engineering Measurement and Instrumentation\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-03-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Symposium on Precision Engineering Measurement and Instrumentation\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2511691\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Precision Engineering Measurement and Instrumentation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2511691","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
摘要
提出了一种基于聚二甲基硅氧烷(PDMS)膜片的外源法布里-珀罗干涉型光纤传声器。直径为4毫米的大型独立式PDMS膜片是通过简单的“旋带”工艺制备的。实验结果表明,该传感器在100~2000Hz范围内具有较高的动压灵敏度,约为-136 dB re 1 rad/μPa。受环境噪声限制,传声器的噪声等效声信号电平约为1000 μPa/Hz1/2。经测试,动态范围大于47.48 dB。该麦克风有望应用于弱声压测试领域。
Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm
An extrinsic Fabry-Perot interferometric fibre microphone based on polydimethylsiloxane, or PDMS, diaphragm was proposed. The large free-standing PDMS diaphragm, with a diameter of 4 mm, is prepared by a simple “spin-strip” process. The experimental result shows that the fabricated sensor has a high dynamic pressure sensitivity of about -136 dB re 1 rad/μPa in the range of 100~2000Hz. The noise equivalent acoustic signal level of the microphone, limited by the environmental noise, is about 1000 μPa/Hz1/2. And the dynamic range is tested to be more than 47.48 dB. The proposed microphone is expected to be used in the field of weak acoustic pressure testing.