{"title":"电磁控制微机械装置参数的研究","authors":"V. Korneyev","doi":"10.1109/INTERNANO.2009.5335621","DOIUrl":null,"url":null,"abstract":"The being developed micromechanical device is designed for control of the optical rays position in space. The device is made in the format of the silicon chip with sizes of 1 × 2 cm and consists of 100 micro-mirrors. Each micromirror has an actuator (an engine) in the form of a magnetic dipole. The device is controlled by an external magnetic field induces a magnetic moment in the dipoles. The device works as a diffraction grating with a variable angle of light, redirecting the reflected light flux into one of the diffraction orders.","PeriodicalId":376370,"journal":{"name":"2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-11-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study of the parameters of micromechanical devices with electromagnetic control\",\"authors\":\"V. Korneyev\",\"doi\":\"10.1109/INTERNANO.2009.5335621\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The being developed micromechanical device is designed for control of the optical rays position in space. The device is made in the format of the silicon chip with sizes of 1 × 2 cm and consists of 100 micro-mirrors. Each micromirror has an actuator (an engine) in the form of a magnetic dipole. The device is controlled by an external magnetic field induces a magnetic moment in the dipoles. The device works as a diffraction grating with a variable angle of light, redirecting the reflected light flux into one of the diffraction orders.\",\"PeriodicalId\":376370,\"journal\":{\"name\":\"2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-11-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INTERNANO.2009.5335621\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INTERNANO.2009.5335621","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Study of the parameters of micromechanical devices with electromagnetic control
The being developed micromechanical device is designed for control of the optical rays position in space. The device is made in the format of the silicon chip with sizes of 1 × 2 cm and consists of 100 micro-mirrors. Each micromirror has an actuator (an engine) in the form of a magnetic dipole. The device is controlled by an external magnetic field induces a magnetic moment in the dipoles. The device works as a diffraction grating with a variable angle of light, redirecting the reflected light flux into one of the diffraction orders.
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