带状和环形栅极设计对nmosfet热载流子效应的影响

Xiaodong Xie, Xiwen Zhang, Wei Li, Xue Fan
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引用次数: 1

摘要

以往采用条纹栅极和环形栅极设计对mosfet热载子效应的研究是相互矛盾的。其背后的原因包括仅使用一个参数来表征热载子效应,技术节点不同,通道宽度与长度之比不相同。我们从阈值电压VT、最大跨导Gmmax和饱和漏极电流IDsat等几个参数来研究这个问题。测试中的nmosfet采用65nm CMOS技术制造。实验结果表明,与条栅设计相比,全电离剂量硬化环形栅NMOSFET在数字电路速度性能上具有更高的热载子可靠性。
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Hot Carrier Effect on NMOSFETs by Stripe and Annular Gate Design
Previous studies about hot carrier effect on MOSFETs by stripe and annular gate design are contradictory. The reasons behind includes that only one parameter is used to characterize the hot carrier effect, technology nodes are different, and the ratio of channel width to length is not identical. We investigate the issue in terms of several parameters including threshold voltage VT, maximum transconductance Gmmax and saturation drain current IDsat. The NMOSFETs under test are fabricated on 65nm CMOS technology. Experiment results demonstrate that the total-ionizing-dose-hardened annular-gate NMOSFET can be characterized by its higher hot-carrier reliability on digital circuit speed performance than stripe-gate design.
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