{"title":"基于WO3薄膜的臭氧传感器的设计与制作","authors":"Yi-Cheng Hung, Zih-Yue Lin, L. Fu, Chia-Yen Lee","doi":"10.1109/ICASI57738.2023.10179582","DOIUrl":null,"url":null,"abstract":"A Micro-Electro-Mechanical Systems based tungsten trioxide thin film micro-ozone sensor is prepared using physical vapor deposition techniques. Given a sufficiently high working temperature, the resistance of the tungsten trioxide film increases linearly with an increasing ozone concentration. The effects of variations in the working temperature on the resistance of the tungsten trioxide sensing layer are suppressed by a PID feedback control system implemented in LabVIEW. It is shown that a working temperature of 250°C results in the device’s maximum sensitivity (3.32 MΩ/ppm) and minimum response time (17 seconds).","PeriodicalId":281254,"journal":{"name":"2023 9th International Conference on Applied System Innovation (ICASI)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design and Fabrication of Ozone Sensor based on WO3 thin film\",\"authors\":\"Yi-Cheng Hung, Zih-Yue Lin, L. Fu, Chia-Yen Lee\",\"doi\":\"10.1109/ICASI57738.2023.10179582\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A Micro-Electro-Mechanical Systems based tungsten trioxide thin film micro-ozone sensor is prepared using physical vapor deposition techniques. Given a sufficiently high working temperature, the resistance of the tungsten trioxide film increases linearly with an increasing ozone concentration. The effects of variations in the working temperature on the resistance of the tungsten trioxide sensing layer are suppressed by a PID feedback control system implemented in LabVIEW. It is shown that a working temperature of 250°C results in the device’s maximum sensitivity (3.32 MΩ/ppm) and minimum response time (17 seconds).\",\"PeriodicalId\":281254,\"journal\":{\"name\":\"2023 9th International Conference on Applied System Innovation (ICASI)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-04-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 9th International Conference on Applied System Innovation (ICASI)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICASI57738.2023.10179582\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 9th International Conference on Applied System Innovation (ICASI)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICASI57738.2023.10179582","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design and Fabrication of Ozone Sensor based on WO3 thin film
A Micro-Electro-Mechanical Systems based tungsten trioxide thin film micro-ozone sensor is prepared using physical vapor deposition techniques. Given a sufficiently high working temperature, the resistance of the tungsten trioxide film increases linearly with an increasing ozone concentration. The effects of variations in the working temperature on the resistance of the tungsten trioxide sensing layer are suppressed by a PID feedback control system implemented in LabVIEW. It is shown that a working temperature of 250°C results in the device’s maximum sensitivity (3.32 MΩ/ppm) and minimum response time (17 seconds).
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