多芯片模块的金属绝缘体结构

P. Kohl
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引用次数: 1

摘要

根据成本收益模型讨论了mcm可用的技术和材料选择。从加工步骤的数量、缺陷密度和加工成本等方面介绍了mcm的基本组成部分。
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Metal Insulator Structures For Multichip Modules
The technology and material choices available for MCMs are discussed in terms of a cost-yield model. The basic building blocks of MCMs are presented and viewed in terms of the number of processing steps, defect density and processing costs.
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