高漏电设备的可靠性监测

2013 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2013-04-14 DOI:10.1109/IRPS.2013.6531960

J. Ryan, J. Campbell, K. Cheung, J. Suehle, R. Southwick, A. Oates

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引用次数: 6

摘要

我们展示了一种新的电荷泵浦(CP)方法，调频CP (FMCP)，它强有力地处理了与高栅极泄漏电流相关的计量挑战。通过移动到交流耦合测量，我们能够轻松地解决小CP信号，尽管过高的栅极泄漏电流背景。我们展示了FMCP作为高规模和高泄漏器件的可靠性监测工具的实用性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Reliability monitoring for highly leaky devices

We demonstrate a new charge pumping (CP) methodology, frequency modulated CP (FMCP), that robustly treats metrology challenges associated with high gate leakage current. By moving to an AC coupled measurement, we are able to easily resolve small CP signals despite excessively high gate leakage current backgrounds. We demonstrate the utility of FMCP as a reliability monitoring tool in highly scaled and highly leaky devices.

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2013 IEEE International Reliability Physics Symposium (IRPS)

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