{"title":"采用随机共振技术进行10mK温度分辨率的纳米级热反射","authors":"D. Luerssen, J. Hudgings, P. Mayer, Rajeev J Ram","doi":"10.1109/STHERM.2005.1412188","DOIUrl":null,"url":null,"abstract":"We present 2D temperature measurements with 250nm spatial and 10mK temperature resolution using thermoreflectance microscopy. We measure the temperature-induced reflectivity change with an accuracy better than /spl Delta/R/R=2/spl middot/10/sup -6/ using a 12bit CCD, which has a quantization limitation of /spl Delta/R/R=2.5/spl middot/10/sup -4/. The dynamic range is thus expanded from 72dB to 114dB, equivalent to more than 18 effective bits. We quantitatively explain this dramatic improvement using the concept of stochastic resonance. In addition, we optimize the thermoreflectance calibration coefficient K/spl equiv/R/sup -1//spl middot/ R/T by matching the illumination wavelength to a combination of the thermoreflectance coefficient spectrum R/T and the reflectivity spectrum R. For gold illuminated with a 467nm LED, we obtain the extraordinarily large value /spl kappa/ =3.3/spl middot/10/sup -4/ K/sup -1/. This calibration coefficient yields a temperature resolution of better than 10mK.","PeriodicalId":256936,"journal":{"name":"Semiconductor Thermal Measurement and Management IEEE Twenty First Annual IEEE Symposium, 2005.","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-03-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"36","resultStr":"{\"title\":\"Nanoscale thermoreflectance with 10mK temperature resolution using stochastic resonance\",\"authors\":\"D. Luerssen, J. Hudgings, P. Mayer, Rajeev J Ram\",\"doi\":\"10.1109/STHERM.2005.1412188\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present 2D temperature measurements with 250nm spatial and 10mK temperature resolution using thermoreflectance microscopy. We measure the temperature-induced reflectivity change with an accuracy better than /spl Delta/R/R=2/spl middot/10/sup -6/ using a 12bit CCD, which has a quantization limitation of /spl Delta/R/R=2.5/spl middot/10/sup -4/. The dynamic range is thus expanded from 72dB to 114dB, equivalent to more than 18 effective bits. We quantitatively explain this dramatic improvement using the concept of stochastic resonance. In addition, we optimize the thermoreflectance calibration coefficient K/spl equiv/R/sup -1//spl middot/ R/T by matching the illumination wavelength to a combination of the thermoreflectance coefficient spectrum R/T and the reflectivity spectrum R. For gold illuminated with a 467nm LED, we obtain the extraordinarily large value /spl kappa/ =3.3/spl middot/10/sup -4/ K/sup -1/. This calibration coefficient yields a temperature resolution of better than 10mK.\",\"PeriodicalId\":256936,\"journal\":{\"name\":\"Semiconductor Thermal Measurement and Management IEEE Twenty First Annual IEEE Symposium, 2005.\",\"volume\":\"9 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-03-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"36\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Semiconductor Thermal Measurement and Management IEEE Twenty First Annual IEEE Symposium, 2005.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/STHERM.2005.1412188\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Semiconductor Thermal Measurement and Management IEEE Twenty First Annual IEEE Symposium, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/STHERM.2005.1412188","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nanoscale thermoreflectance with 10mK temperature resolution using stochastic resonance
We present 2D temperature measurements with 250nm spatial and 10mK temperature resolution using thermoreflectance microscopy. We measure the temperature-induced reflectivity change with an accuracy better than /spl Delta/R/R=2/spl middot/10/sup -6/ using a 12bit CCD, which has a quantization limitation of /spl Delta/R/R=2.5/spl middot/10/sup -4/. The dynamic range is thus expanded from 72dB to 114dB, equivalent to more than 18 effective bits. We quantitatively explain this dramatic improvement using the concept of stochastic resonance. In addition, we optimize the thermoreflectance calibration coefficient K/spl equiv/R/sup -1//spl middot/ R/T by matching the illumination wavelength to a combination of the thermoreflectance coefficient spectrum R/T and the reflectivity spectrum R. For gold illuminated with a 467nm LED, we obtain the extraordinarily large value /spl kappa/ =3.3/spl middot/10/sup -4/ K/sup -1/. This calibration coefficient yields a temperature resolution of better than 10mK.
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