采用片上测试芯片，最大限度地提高28nm零件的参数良率

Proceedings of the 2015 International Conference on Microelectronic Test Structures Pub Date : 2015-03-23 DOI:10.1109/ICMTS.2015.7106107

J. Mueller, S. Jallepalli, R. Mooraka, S. Hector

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引用次数: 1

摘要

我们表明，一套设计良好的过程观察结构(POSt)，可以在标准生产测试仪上进行测试，是实现高参数产量的宝贵资产。我们根据电路良率特征定制测试覆盖范围和条件的能力使我们能够在很小的测试时间预算内获得所需的学习。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Employing an on-die test chip for maximizing parametric yields of 28nm parts

We show that a well designed suite of process observation structures (POSt) that can be tested on a standard production tester is a valuable asset for achieving high parametric yields. Our ability to tailor test coverage and conditions based on circuit yield signatures has allowed us to obtain the needed learning within a small test time budget.

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Proceedings of the 2015 International Conference on Microelectronic Test Structures

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