一种用于MOVPE系统的25kw, 25khz的L-LC谐振逆变器感应加热电源

M. Borage, S. Tiwari
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引用次数: 8

摘要

一种名为L-LC谐振逆变器(RI)的拓扑结构用于感应加热(IH)应用,它吸收了传统串联和并联谐振方案的大部分优点,同时消除了它们的局限性。本文重新研究了L-LC RI的基频交流分析,并提出了一个新的工作点,与传统工作点相比,该工作点具有增强的电流增益和近同相工作。文中还对采用方波电压源的电路进行了近似分析,重点讨论了辅助电感对电压源电流波形的影响。分析还得出了辅助电感的最佳选择。介绍了金属有机气相外延(MOVPE)系统对石墨敏感体加热到1200°C,需要25 kW, 25 kHz IH电源的要求,所开发的IH系统的结构和实验结果。
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A 25 kW, 25 kHz Induction Heating Power Supply for MOVPE System Using L-LC Resonant Inverter
A topology named L-LC resonant inverter (RI) for induction heating (IH) applications takes most of the merits of the conventional series and parallel resonant schemes, while eliminating their limitations. In this paper, fundamental frequency AC analysis of L-LC RI is revisited, and a new operating point is suggested featuring enhanced current gain and near in-phase operation as compared to the conventional operating point. An approximate analysis of the circuit with square-wave voltage source is also described highlighting the effect of auxiliary inductor on the source current waveform. The analysis also leads to an optimum choice of the auxiliary inductance. The requirements of the metal organic vapour phase epitaxy (MOVPE) system in which a graphite susceptor is required to be heated to 1200°C demanding a 25 kW, 25 kHz IH power supply, the configuration of developed IH system, and experimental results are presented.
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