铝浓度对喷雾热解法制备ZnO薄膜物理性能的影响

S. Boulmelh, Lynda Saci
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引用次数: 1

摘要

本工作研究了铝浓度(0%、1%、3%、5%、7.5%和10%)对氧化锌(ZnO)薄膜某些物理性能的影响。采用喷雾热解法在350℃下在光学玻璃衬底上沉积ZnO掺杂Al (ZnO: Al)薄膜。具有六方w rzite相的多晶薄膜具有平行于c轴的强(002)优先取向。该方向随着铝浓度的增加逐渐消失(>7.5%)。当铝浓度为1%、3%和5%时,得到的晶粒尺寸值都令人满意。另外,在铝浓度为5%和7.5%时,透射率最高(95%)。当铝浓度为7.5%时,Eg的最佳值为3.44 eV。最后,所有结果都证实了在7.5%铝浓度下沉积的薄膜更适合作为太阳能电池的窗口层。
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Effect of Aluminium Concentration on Physical Properties of ZnO Films Synthesized by Spray Pyrolysis Method
The present work study, the effect of aluminum concentration (0%, 1%, 3%, 5%, 7.5% and 10%) on some physical properties of zinc oxide (ZnO) films. All ZnO doped Al (ZnO: Al) thin films were deposited on optical glass substrates at 350°C by spray pyrolysis method. Polycrystalline films with a hexagonal würtzite phase present a strong (002) preferred orientation parallel to the c-axis. This direction that gradually disappear with increasing aluminum concentration (>7.5%). The grain size obtained values was satisfactory for 1%, 3% and 5% Al-concentrations. In addition, the highest transmittance (95%) was detected at 5% and 7.5% Al concentration. The best obtained value of the Eg is 3.44 eV for an aluminum concentration of 7.5%. Finally, all results confirm that the film deposited with 7.5% Al concentration is the better suited as a window layer in solar cells application.
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