化学气相沉积石墨烯在直流至110 MHz范围内的射频输运电磁特性

S. Awan, G. Pan, Laith M. Al Taan, Bing-Jing Li, N. Jamil
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引用次数: 4

摘要

作者报告了室温下化学气相沉积石墨烯在直流(DC)至110 MHz频率范围内的射频(RF)传输电磁特性的测量。Si/SiO2衬底上的石墨烯安装在屏蔽的四终端对(4TP)适配器中,可以直接连接到校准的精密阻抗分析仪进行测量。在40 Hz下,直流四探针电阻和4TP电阻具有很好的一致性,均产生R≈104 Ω。总的来说,石墨烯通道的表观电磁特性受到衬底寄生电容和电阻的强烈影响,特别是在高频f > 1 MHz时。提出了一个现象学集总参数等效电路模型,该模型与石墨烯4TP阻抗器件在大约70年的传输交流电频率范围内的频率响应相匹配。基于该模型,首次证明了4TP器件的固有石墨烯通道电阻是“频率无关”的,其R G≃105 Ω或片电阻约为182 Ω/□。该器件的寄生基板阻抗为R P≃2.2 Ω, C P≃600 pF。上述结果表明,该方法与传统的直流四探针方法在测量单原子厚材料的本征片电阻方面具有良好的一致性,在射频电子学、交流量子霍尔效应测量和基于石墨烯4TP器件的传感器等领域具有广阔的应用前景。
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Radio-frequency transport Electromagnetic Properties of chemical vapour deposition graphene from direct current to 110 MHz
The authors report measurement of the radio-frequency (RF) transport electromagnetic properties of chemical vapour deposition graphene over the direct current (DC) to 110 MHz frequency range at room temperature. Graphene on Si/SiO2 substrate was mounted in a shielded four terminal-pair (4TP) adaptor which enabled direct connection to a calibrated precision impedance analyser for measurements. Good agreement is observed for the DC four-probe resistance and the 4TP resistance at 40 Hz, both yielding R ≈ 104 Ω. In general, the apparent graphene channel electromagnetic properties are found to be strongly influenced by the substrate parasitic capacitance and resistance, particularly for high-frequencies f > 1 MHz. A phenomenological lumped-parameter equivalent circuit model is presented which matches the frequency response of the graphene 4TP impedance device over approximately seven decades of the frequency range of the applied transport alternating current. Based on this model, it is shown for the first time, that the intrinsic graphene channel resistance of the 4TP device is ‘frequency-independent’ with R G ≃ 105 Ω or sheet resistance of approximately 182 Ω/□. The parasitic substrate impedance of the device is found to be R P ≃ 2.2 Ω and C P ≃ 600 pF. These results suggest that our new RF 4TP method is in good agreement with the conventional DC four-probe method for measuring the intrinsic sheet resistance of single-atom thick materials and could potentially open up new applications in RF electronics, AC quantum Hall effect metrology and sensors based on graphene 4TP devices operating over a broad range of frequencies.
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