用于高性能应用的高k介电的GaAs无结FinFET

Ajay Kumar, Anuj Chhabra, R. Chaujar
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引用次数: 4

摘要

本文提出了用于高性能应用的GaAs无结(JL)-FinFET。并与传统的JL-FinFET进行了比较。FinFET的设计使用金属栅极,使用Si3N4作为栅极和源极/漏极之间的间隔层,并使用高k BOX。输出和输入特性进行了比较。发现GaAs JL-FinFET提供更低的泄漏电流。进一步研究了器件内部的电势,表明在关断状态下通道区域的电势减小。在能带图中,费米能级与导通能级之间存在较大的差异,表明在关断状态下导通较少。研究了器件内部的电子电荷密度,表明在关闭状态下大多数载流子浓度的损耗。FinFET被用于设计SRAM,因为它具有读取稳定性,并且具有更小的寄生电容,更小的漏电流和更高的开关速度。
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GaAs Junctionless FinFET Using High-k Dielectric for High-Performance Applications
This paper proposes GaAs junctionless (JL)-FinFET for high-performance applications. Results are so obtained and compared with conventional JL-FinFET. FinFET is designed using the metal gate and using Si3N4 as a spacer between gate and source/drain and using high-k BOX. Output and input characteristics are compared. GaAs JL-FinFET is found to provide lower leakage current. Further, potential inside the device is studied which show decrease in potential in the channel region in off state. In energy band diagram, higher difference is observed between Fermi and conduction level showing less conduction in off state. Electron charge density inside the device is also studied which shows the depletion of majority charge carrier concentration in off state. FinFET is being used to design SRAM as it is found to bring read stability and is found to have less parasitic capacitance, less leakage current and higher switching speed.
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