基于热像素(thxel)阵列分层芯片的电子封装分层检测

Akhil Kumar, M. Schulz, S. Sheva, J. Keller, V. Bader, M. Wöhrmann, J. Bauer, D. May, B. Wunderle
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引用次数: 1

摘要

我们在开发新的无损系统方面取得了进展,该系统用于现场状态监测和检测电子封装内接口的分层。在具有10 \ × 10$mm2硅芯片的倒装芯片的4个象限中的每一个象限内都设计了基于5 \ × 5$焊料的thxels矩阵。设计了基于FCOB方法的硬件布局。在FCOB的生产和组装以及测试系统之前,通过在硅侧使用SiO2的UBM进行了有限元研究,以进行可行性验证。随后,生产了两批FCOB组件。一套有底料,另一套没有。然后在基于多路复用器的自建测量系统上进行测试,该系统具有基于软件的锁定算法,以接收3 ω输出信号。在Thixel中成功测量了3 ω电压的变化,结果显示在最佳灵敏度为500 Hz的频率下具有良好的信噪比。然而,我们目前能够一次测量一个象限,并且将来有可能将其扩展到至少两个象限,甚至更多。此外,由于获得了良好的信噪比值,我们可以通过改变采样参数将每个传感器的测量时间进一步减少到1.25 s以下。
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Delamination Detection in an Electronic Package by Means of a Newly Developed Delamination Chip Based on Thermal Pixel (Thixel) Array
We have made advancement towards developing our novel and non-destructive system for in-situ condition monitoring and detection of delamination of interfaces within electronic packages. A matrix of $5 \times 5$ solder based Thixels has been designed within each of the 4 Quadrants of a flip chip with a $10 \times 10$mm2 Silicon die. Hardware layout based on a FCOB approach was designed. Before the production and assembly of the FCOB along with the testing system, a finite element study was performed to make a feasibility check by using a UBM of SiO2 on the Silicon side. Afterwards, two batches of FCOB assemblies were produced. One set with underfill and the other without. These were then tested upon a multiplexer based self-built measurement system with a software based lock-in algorithm to receive 3 omega output signals. The change in the 3 omega voltage was successfully measured in the Thixel and the results depict a good SNR at the frequency of optimum sensitivity of 500 Hz. However, we are currently able to measure one quadrant at a time and in future have the possibility to extend this to at least two, if not more. Also, with the good SNR value that has been achieved, we can further decrease the measurement time per sensor to less than 1.25 s by varying sampling parameters.
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