准分子激光器电极轮廓的选择

S. Anufrik, A. Volodenkov, K. Znosko
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引用次数: 3

摘要

在准分子激光器中,Chang的轮廓和Ernst的轮廓得到了广泛的应用。当电极间距(h)值与电极宽度(b)的关系为h/b> 0时,Y坐标上的电场具有明显的非均匀性。借助保角变换的应用,研究了电场的空间依赖性。
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Selection of electrodes profile for excimer lasers
In excimer lasers Chang's profile and Ernst's profile are widely used. At relation of value of interelectrode distance (h) to electrodes width (b) h/b> 0,5 significant heterogeneity of electric field on coordinate Y takes place. Research of electric field spatial dependence was carried out with help of conformal transformations application.
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