通过65nm CMOS技术的三井导致ESD和锁存失效

D. Alvarez, W. Hartung, R. Bhandari
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引用次数: 3

摘要

提出了65纳米CMOS技术中的ESD和锁存故障,尽管三井隔离阻止了经典4层可控硅结构的形成,但仍会触发寄生晶闸管。研究了阳极阴极间距、保护环保护和井电阻对该寄生器件触发的影响。
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ESD and Latch-up failures through triple-well in a 65nm CMOS technology
ESD and latch-up failures in a 65nm CMOS technology are presented where the triggering of a parasitic thyristor occurs despite the triple-well isolation that prevents the formation of a classical 4-layer SCR structure. The influence on triggering of the anode-to-cathode spacing, guard-ring protection and well resistances are studied for this type of parasitic device.
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