AlGaN/GaN功率器件中的负动态Ron

P. Moens, M. Uren, A. Banerjee, M. Meneghini, B. Padmanabhan, W. Jeon, S. Karboyan, M. Kuball, G. Meneghesso, E. Zanoni, M. Tack
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引用次数: 18

摘要

通过对GaN缓冲结构的优化,获得了具有负动态Ron的650V额定AlGaN/GaN功率器件。通过明智地调整[C]掺杂和非故意掺杂(UID)层的电阻率(即这些层中的电荷输运性质),可以实现正电荷而不是有害的负电荷捕获。长期可靠性测试表明,正电荷可保留数天。
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Negative dynamic Ron in AlGaN/GaN power devices
Through optimization of the GaN buffer structure, 650V rated AlGaN/GaN power devices with negative dynamic Ron are obtained. By judicious tuning of the resistivity of the [C]-doped and unintentionally-doped (UID) layers (i.e. the charge transport properties in these layers), positive rather than the deleterious negative charged trapping can be achieved. Long term reliability testing shows that the positive charge can be retained for days.
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