{"title":"采用溅射和PLD技术在SiO/sub /(100)衬底上制备高矫顽力钴铁氧体薄膜","authors":"J. Yin, J. Ding, B. Liu, Y. Wang, Y. Yi","doi":"10.1109/INTMAG.2005.1464073","DOIUrl":null,"url":null,"abstract":"Co-ferrite thin films are interesting for magnetic recording and magneto-optical devices. In this work, we have prepared Co-ferrite thin films on SiO/sub 2/ substrate with high coercivity by sputtering and PLD. The film thickness was around 50 nm. All the films were subsequently annealed at a temperature of 500 to 1000/spl deg/C. As-sputtered Co-ferrite film possessed an amorphous-like structure, as no X-ray diffraction peak was observed. Crystallization required an annealing at 500/spl deg/C or higher. High coercivity was obtained after annealing at 900-1000/spl deg/C. High coercivity was associated with nanostructure. Hysteresis loops of the samples were annealed at 900/spl deg/C. It has been found out that substrate also played an important role. Similar trend of magnetic properties was observed in PLD-derived samples.","PeriodicalId":273174,"journal":{"name":"INTERMAG Asia 2005. Digests of the IEEE International Magnetics Conference, 2005.","volume":"67 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-04-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"High-coercivity Co-ferrite thin films on SiO/sub 2/(100) substrate prepared by sputtering and PLD\",\"authors\":\"J. Yin, J. Ding, B. Liu, Y. Wang, Y. Yi\",\"doi\":\"10.1109/INTMAG.2005.1464073\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Co-ferrite thin films are interesting for magnetic recording and magneto-optical devices. In this work, we have prepared Co-ferrite thin films on SiO/sub 2/ substrate with high coercivity by sputtering and PLD. The film thickness was around 50 nm. All the films were subsequently annealed at a temperature of 500 to 1000/spl deg/C. As-sputtered Co-ferrite film possessed an amorphous-like structure, as no X-ray diffraction peak was observed. Crystallization required an annealing at 500/spl deg/C or higher. High coercivity was obtained after annealing at 900-1000/spl deg/C. High coercivity was associated with nanostructure. Hysteresis loops of the samples were annealed at 900/spl deg/C. It has been found out that substrate also played an important role. Similar trend of magnetic properties was observed in PLD-derived samples.\",\"PeriodicalId\":273174,\"journal\":{\"name\":\"INTERMAG Asia 2005. Digests of the IEEE International Magnetics Conference, 2005.\",\"volume\":\"67 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-04-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"INTERMAG Asia 2005. Digests of the IEEE International Magnetics Conference, 2005.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INTMAG.2005.1464073\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"INTERMAG Asia 2005. Digests of the IEEE International Magnetics Conference, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INTMAG.2005.1464073","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
High-coercivity Co-ferrite thin films on SiO/sub 2/(100) substrate prepared by sputtering and PLD
Co-ferrite thin films are interesting for magnetic recording and magneto-optical devices. In this work, we have prepared Co-ferrite thin films on SiO/sub 2/ substrate with high coercivity by sputtering and PLD. The film thickness was around 50 nm. All the films were subsequently annealed at a temperature of 500 to 1000/spl deg/C. As-sputtered Co-ferrite film possessed an amorphous-like structure, as no X-ray diffraction peak was observed. Crystallization required an annealing at 500/spl deg/C or higher. High coercivity was obtained after annealing at 900-1000/spl deg/C. High coercivity was associated with nanostructure. Hysteresis loops of the samples were annealed at 900/spl deg/C. It has been found out that substrate also played an important role. Similar trend of magnetic properties was observed in PLD-derived samples.