光学制造过程控制

O. Faehnle
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引用次数: 0

摘要

在光学制造技术中,可预测和稳定的制造过程对于可靠的成本和质量管理至关重要。本文报告了生成和控制最佳工艺参数集的策略,例如小光学器件的子孔径抛光(具有小于2mm的清晰孔径)。重点放在区分机器和工艺优化演示之间,例如,有可能通过控制临界切割深度以外的其他手段建立韧性模式磨削过程。最后,最近开发的一种原位测试技术应用于在机器上监测表面质量,同时对被测表面进行磨料加工,从而实现抛光过程的在线优化,最终最大限度地减少抛光时间和制造成本。
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Process control in optical fabrication
Predictable and stable fabrication processes are essential for reliable cost and quality management in optical fabrication technology. This paper reports on strategies to generate and control optimum sets of process parameters for e.g. sub-aperture polishing of small optics (featuring clear apertures smaller than 2 mm). Emphasis is placed to distinguish between machine and process optimization demonstrating, that e.g. it is possible setting up ductile mode grinding process by other means than controlling critical depth of cut. Finally, a recently developed in situ testing technique is applied to monitor surface quality on-machine while abrasively working the surface under test enabling an on-line optimization of polishing processes eventually minimizing polishing time and fabrication cost.
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