可靠性设计中NBTI效应的预测建模

Sarvesh Bhardwaj, Wenping Wang, R. Vattikonda, Yu Cao, S. Vrudhula
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引用次数: 437

摘要

本文建立了PMOS在短期和长期运行下的负偏置温度不稳定性(NBTI)预测模型。基于反应-扩散(R-D)机制,该模型准确捕捉了NBTI对氧化物厚度(tox)、扩散物质(H或H2)以及其他关键晶体管和设计参数的依赖关系。此外,还推导了多周期动态工作下阈值电压变化(DeltaVth)的封闭表达式。通过90 nm的实验和仿真数据验证了模型的准确性和有效性。进一步研究了NBTI对代表性数字电路的影响
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Predictive Modeling of the NBTI Effect for Reliable Design
This paper presents a predictive model for the negative bias temperature instability (NBTI) of PMOS under both short term and long term operation. Based on the reaction-diffusion (R-D) mechanism, this model accurately captures the dependence of NBTI on the oxide thickness (tox), the diffusing species (H or H2) and other key transistor and design parameters. In addition, a closed form expression was derived for the threshold voltage change (DeltaVth ) under multiple cycle dynamic operation. Model accuracy and efficiency were verified with 90-nm experimental and simulation data. The impact of NBTI was further investigated on representative digital circuits
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