{"title":"基于监测过程建模的多层光学镀膜成品率优化","authors":"G. Muscalu","doi":"10.1117/12.312732","DOIUrl":null,"url":null,"abstract":"In this paper, one investigated the yield of some optical coatings with a nonquarterwave structure within the classical vacuum systems by modeling of the monitoring process. The correlation of the synthesis and modeling process, allows to set the optimum monitoring process for different types of coatings. The experimental results tested on antireflection coatings are according to the theoretical ones.","PeriodicalId":383583,"journal":{"name":"ROMOPTO International Conference on Micro- to Nano- Photonics III","volume":"3405 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Yield optimization of multilayer optical coating by modeling of the monitoring process\",\"authors\":\"G. Muscalu\",\"doi\":\"10.1117/12.312732\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, one investigated the yield of some optical coatings with a nonquarterwave structure within the classical vacuum systems by modeling of the monitoring process. The correlation of the synthesis and modeling process, allows to set the optimum monitoring process for different types of coatings. The experimental results tested on antireflection coatings are according to the theoretical ones.\",\"PeriodicalId\":383583,\"journal\":{\"name\":\"ROMOPTO International Conference on Micro- to Nano- Photonics III\",\"volume\":\"3405 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-07-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ROMOPTO International Conference on Micro- to Nano- Photonics III\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.312732\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ROMOPTO International Conference on Micro- to Nano- Photonics III","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.312732","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Yield optimization of multilayer optical coating by modeling of the monitoring process
In this paper, one investigated the yield of some optical coatings with a nonquarterwave structure within the classical vacuum systems by modeling of the monitoring process. The correlation of the synthesis and modeling process, allows to set the optimum monitoring process for different types of coatings. The experimental results tested on antireflection coatings are according to the theoretical ones.
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