声表面波换能器的反射阵列建模

D. P. Morgan
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引用次数: 18

摘要

本文提出了一种具有内反射的声表面波换能器的建模新方法,如单电极换能器和各种类型的SPUDT。在过去,分析这些传感器的主要方法是耦合模式(COM)分析。后者是近似的,主要是因为它以微分方程控制的平滑变量表示换能器(具有离散性质);COM也不容易与换能器物理相关。其他基于物理的理论方法更为准确和合理,但通常不方便且计算耗时。本文提出的反射阵列模型(RAM)提供了一种比COM更精确、更合理的方法,同时保留了计算方便的特点。反射分析采用级联技术,即使电极反射系数很大,也能得到完全准确的声散射。转导分析是基于准静态方法用于非反射换能器。由于它是从静电溶液中推导出来的,所以这种方法非常准确,例如,它给出了正确的谐波响应,并正确地模拟了电极宽度变化的影响。与COM相比,RAM对于较短的换能器和较宽的分析频带是准确的,它可以给出正确的谐波响应,并且易于分析加权换能器。
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Reflective array modelling for SAW transducers
This paper presents a new method for modelling SAW transducers with internal reflections, such as single-electrode transducers and various types of SPUDT. In the past the main method for analysing these transducers has been the coupled-mode (COM) analysis. The latter is approximate mainly because it represents the transducer (which has a discrete nature) in terms of smoothly-varying quantities governed by differential equations; also the COM is not easily related to the transducer physics. Other theoretical approaches, based on the physics, are more accurate and justifiable, but are usually inconvenient and time-consuming to compute. The Reflective Array Model (RAM) presented here gives a method more accurate and better justified than the COM, while retaining the feature of computational convenience. Reflections are analysed by a cascading technique which gives the acoustic scattering with full accuracy even if the electrode reflection coefficient is large. Transduction analysis is based on the quasi-static method used for non-reflecting transducers. Because of its derivation from the electrostatic solution, this method is very accurate, giving for example correct harmonic responses and correctly modelling the effects of changing electrode width. In contrast to COM, the RAM is accurate for short transducers and for wide analysis bands, it can give correct harmonic responses and it easily analyses weighted transducers.
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