快速热加工法制备CZTS薄膜

M. A. Olgar, Y. Atasoy
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摘要

在Mo镀膜玻璃衬底上采用硫化法制备了CZTS薄膜。依次沉积Cu、Zn和Sn薄膜层,形成Glass/Mo/CuSn/Zn/Cu薄膜层。叠层结构CuSn层是在溅射室中依次沉积Cu和Sn后经过退火处理形成的。采用快速热加工方法(RTP)进行硫化处理,得到kesterite CZTS结构。采用EDX、XRD、拉曼光谱、SEM和PL等表征方法对制备的CZTS薄膜进行了分析。EDX测量表明,在含硫气氛中退火后,没有观察到元素损失。制备的CZTS薄膜具有Cu化学计量量和富Zn成分。退火后样品的XRD谱图显示出kesterite CZTS结构的形成。样品的拉曼光谱证实了kesterite CZTS结构的形成。此外,拉曼光谱还检测到结构中存在一些CTS相。SEM表面形貌观察到多晶表面微观结构。室温PL测量显示在1.39 eV附近有一个跃迁,非常接近kesterite CZTS结构的带隙。总的来说,本研究表明,采用RTP方法可以很容易地制备CZTS薄膜结构,并且加热速率非常高。
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PREPARATION OF CZTS THIN FILM EMPLOYING RAPID THERMAL PROCESSING METHOD
CZTS thin film was fabricated by sulfurization process of deposited thin films on Mo coated glass substrates. Cu, Zn, and Sn thin film layers were deposited sequentially to form Glass/Mo/CuSn/Zn/Cu. The CuSn layer in the stacked structure was formed by annealing process in the sputtering chamber after sequential deposition of Cu and Sn, respectively. The sulfurization process was performed by rapid thermal processing method (RTP) so as to obtain kesterite CZTS structure. The obtained CZTS thin film was analyzed using several characterization methods such as EDX, XRD, Raman spectroscopy, SEM and PL measurements. The EDX measurements showed that elemental loss was not observed after the annealing process in sulfur atmosphere. The fabricated CZTS thin film showed Cu stoichiometric and Zn rich composition. The XRD pattern of annealed sample revealed formation of kesterite CZTS structure. The Raman spectra of the sample proved formation of kesterite CZTS structure. In addition, some CTS phases were detected in the structure by Raman spectroscopy. Polycrystalline surface microstructure was seen in SEM surface measurement. The room temperature PL measurement exhibited a transition around at 1.39 eV that is very close to band gap of kesterite CZTS structure. Overall, with this study, it has been shown that the CZTS thin film structure can be easily produced using the RTP method with very high heating rate.
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