模拟和调整RRAM金属氧化物堆中的灯丝特性,以优化稳定循环

R. Degraeve, L. Goux, S. Clima, B. Govoreanu, Y. Chen, G. Kar, P. Rousse, G. Pourtois, D. Wouters, L. Altimime, M. Jurczak, G. Groeseneken, J. Kittl
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引用次数: 11

摘要

形成电流均匀型是HfO2 RRAM堆栈稳定循环的关键参数。(i)过低的均匀度会导致复位时灯丝电流减少的收缩“伸长”,迅速导致故障。(ii)在QPC模型中,均匀度过高且不受限制导致对丝性质的控制较差,表现为宽的v0分布。(iii)在两者之间,Iform与最小可实现的HRS电流直接相关,并且形成了一个狭窄,稳定的灯丝,允许器件缩放以及多级编程。
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Modeling and tuning the filament properties in RRAM metal oxide stacks for optimized stable cycling
Forming current Iform is a crucial parameter for stable cycling in a HfO2 RRAM stack. (i) Too low Iform results in constriction `elongation' for filament current reduction during reset, quickly leading to failure. (ii) Too high and unlimited Iform leads to poor control of the filament nature expressed as a wide V0-distribution in the QPC model. (iii) In between, Iform is directly correlated to the minimal achievable HRS current and a narrow, stable filament is formed which allows for device scaling as well as multi-level programming.
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