Christian Schober, C. Pruss, A. Herkommer, W. Osten
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引用次数: 2
摘要
纳米分辨率测量是复杂形状高精度光学器件开发和生产中的一个重要课题。ITO的纳米定位和纳米测量机NPMM-200专为200 mm x 200 mm x 25 mm的大规模测量体积的纳米级定位而设计。该机器的概念是基于一个高精度的干涉测量控制阶段在一个稳定的计量框架由玻璃陶瓷制成。在这个框架中，可以附加不同类型的传感器来测量表面地形。在这篇文章中，我们介绍了使用光学传感器，如固定焦点探头，测量高精度非球面和自由曲面光学与这台新机器。
The NPMM-200: large area high resolution for freeform surface measurement
Nanometer resolution metrology is a significant topic in the development and production of complex shaped high precision optics. The Nanopositioning and Nanomeasuring Machine NPMM-200 at ITO is built for nanometer scale positioning in a large scale measurement volume of 200 mm x 200 mm x 25 mm. The concept of the machine is based on a high precision interferometrically controlled stage in a stable metrological frame made of glass-ceramic. In this frame, different types of sensors can be attached for measurement of surface topographies. In this contribution, we present the use of optical sensors, such as a fixed focus probe, for measuring of high precision aspheric and freeform optics with this new machine.
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