太赫兹宽带区域定制折射率的亚波长硅蜂窝结构

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318809

Sang-Gil Park, K. Jin, Minwoo Yi, J. C. Ye, Jaewook Ahn, K. Jeong

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摘要

本文提出了一种亚波长硅蜂窝结构在太赫兹宽带频率下的定制指数。该结构采用深度反应离子刻蚀工艺制备，并根据结构的尺寸定制相应的指标。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Subwavelength silicon honeycomb structure for tailored index in terahertz broadband region

This work presents tailored index in terahertz broadband frequency by a subwavelength silicon honeycomb structures. The structure is fabricated by deep reactive ion etching process and their indices are tailored depending on size of structures.

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2012 International Conference on Optical MEMS and Nanophotonics

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