在同一基底上加工多个自由曲面镜的超精密金刚石车削的机械设计实现和数学考虑

J. Hartung, M. Beier, T. Peschel, A. Gebhardt, S. Risse
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引用次数: 9

摘要

对于由金属(一般自由曲面)反射镜组成的光学系统,存在几种金刚石车削加工方法。这些在后期系统的制造和集成方面的努力使其与众不同。在制造阶段投入的工作越多,随后的校准和集成就越不复杂。例如,如果系统的每个镜子都被制造成一个单一的光学元件,那么在集成阶段,大多数自由度必须对齐。对于具有三个自由形反射镜的三镜散像,自由度总和为18。因此,镜面本身的制造或多或少是容易的,但集成是非常困难的。要解决这个集成问题,设计和制造过程链中有三个主要部分需要考虑。在工艺链的第一个位置是光学设计。在这个阶段,制造和设计之间的协商可以提高可制造性,因为有更多可能的集成方法。第二阶段是机械设计。这里已经选择了合适的制造方法,但由于与应力规范等不兼容,可能需要重新考虑。第三个阶段是制造阶段。这里有不同的夹紧方式和制造方法可能。目前的文章将重点介绍一种方法(“合片”),在一个衬底上制造两个镜子,因此要对准的自由度减少到六个。与单镜制造相比,这大大提高了系统集成所需的时间。
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Mechanical design implementation and mathematical considerations for ultra precise diamond turning of multiple freeform mirrors on a common substrate
For optical systems consisting of metal (in general freeform) mirrors there exist several diamond turning fabrication approaches. These are distuingished by the effort in manufacturing and integration of the later system. The more work one puts into the manufacturing stage the less complicated is the alignment and integration afterwards. For example the most degrees of freedom have to be aligned in integration phase if every mirror of the system is fabricated as a single optical component. For a three mirror anastigmat with three freeform mirrors the degrees of freedom sum up to 18. Therefore the mirror fabrication itself is more or less easy, but the integration is very difficult. There are three major parts in the design and manufacturing process chain to be considered for tackling this integration problem. At the first position in the process chain there is the optical design occuring. At this stage a negotiation between manufacturing and design could improve manufacturability because of more possible integration approaches. The second stage is the mechanical design. Here the appropriate manufacturing approach is already chosen, but may be revisited due to incompatiblities with, e.g., stress specifications. The third level is the manufacturing stage. Here are different clamping approaches and fabrication methods possible. The current article will focus on an approach ("snap-together") where two mirrors are fabricated on one substrate and therefore a reduction of the number of degrees of freedom to be aligned are reduced to six. This improves the amount of time needed for the system integration significantly in contrast to a single mirror fabrication.
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